Deposition and some properties of carbide/amorphous carbon nanocomposites for tribological application

Precht, W.; Czyżniewski, A.

doi:10.1016/s0257-8972(03)00586-3

Cited by 42 publications

(16 citation statements)

References 9 publications

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“…The same type of structure can also be observed for the TiC film, TiC 1.6 , which is an interesting result since the carbon content is relatively high. This relatively high carbon content induces that in this particular TiC film, prepared in the same conditions used for the TiC x O y films, there might be also an amorphous carbon phase in the grain boundaries of the TiC grains, forming a composite of the type nc-TiC/a-C, as claimed by several authors [21][22][23]. An oxygen contamination amount between 1 and 5 at.% is also to be admitted in this sample.…”

Section: Resultssupporting

confidence: 58%

The influence of structure changes in the properties of TiCxOy decorative thin films

et al. 2007

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The main purpose of this work consists in the preparation of titanium oxycarbide, TiC x O y , thin films, in which the presence of oxygen changed the film properties between those of titanium carbide and those of titanium oxide. Varying the oxide/carbide ratio allowed to tune the structure of the films between titanium oxide and carbide and consequently electronic, mechanical and optical properties of the films. The depositions were carried out from a TiC target by direct current, dc, reactive magnetron sputtering, varying the oxygen flow rate. The obtained results showed that the film's properties can be divided into 3 different regimes -i) carbide, ii) a transition zone and iii) an oxide one. X-ray diffraction results revealed the occurrence of a face-centered cubic phase (TiC-type) for low oxygen content, also obtained in the TiC 1.6 (O) film, with a clear tendency towards amorphization with the increase of the oxygen flow rate. For the highest oxygen contents, the results revealed the development of a mixture of poorly crystallized TiO 2 phases. The colour results indicated a strong dependence on the O/Ti ratio. A progressive reduction of hardness and residual stresses with the increase of the O/Ti ratio was also observed. The residual stresses, as well as the film structure, seem to play an important role on the adhesion of the coatings. The static friction coefficient revealed also some correlation with the mechanical properties, but mainly with the surface roughness.

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Section: Resultssupporting

confidence: 58%

The influence of structure changes in the properties of TiCxOy decorative thin films

et al. 2007

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“…It can be done in different ways. Preparation of the films with varied C-Si compositions is technologically easily achieved by reactive magnetron sputtering of C or Si target in the presence of corresponding gas like SiH 4 or CH 4 or both together [6][7][8]. However in this case the a-SiC:H films of any composition deposited at low substrate temperature contain much hydrogen.…”

Section: Introductionmentioning

confidence: 99%

“…In order to find the compromised optimum of high hardness and low friction coefficient the a-SiC:H films were deposited at room temperature in two different ways: (i) by sputtering of Si target in the gas mixture of Ar and CH 4 ; (ii) by sputtering of SiC target in the mixture of Ar and CH 4 . In the second case using small addition of CH 4 gas allows easily varying an excess of carbon in the film without significant increase of hydrogen content in comparison with the first case or above mentioned methods [6][7][8] where CH 4 gas plays not as an additional, but the main role for a-SiC:H synthesis. The work focuses on the comparison of mechanical and tribological properties of the films prepared by these ways to find the best combination of these properties.…”

Section: Introductionmentioning

confidence: 99%

Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH4 gas

Kulikovsky

Vorlı́ček

Čtvrtlík

et al. 2011

Surface and Coatings Technology

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“…hybrid plasma-enhanced chemical and vapour deposition processes [16] [11] or by pulsed reactive magnetron sputtering [17]. In this study we report the tribological results of Me-DLC films grown by ECR-CVD on silicon substrates with metal nanoparticles spread over.…”

Section: Introductionmentioning

confidence: 99%

Improving the tribological properties of DLC (Fullerene-like) films grown by ECR-CVD with metal nanoparticles incorporation

Pardo

Gómez‐Aleixandre

2011

MRS Proc.

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Thin Me-DLC films with different metal contents have been deposited by ECR-CVD (Electron Cyclotron Resonance Chemical Vapour Deposition). Before the growth process, metal nanoparticles were scattered over the substrate surface by dipping it into a dispersion previously sonicated. The concentration of the dispersion (150, 300, 500 and 5000 ppm) controls the metal content into the carbon coating. The morphology of the deposited samples was analysed by SEM (Scanning Electron Microscopy). The metal content in the carbon films has been evaluated by SIMS (Secondary Ion Mass Spectroscopy). The incorporation of low amounts of metal nanoparticles into the hard carbon coating produces an outstanding improvement in the durability of the layer, as detected by pin-on-disc tests. For an optimum chromium content of 300 ppm of nanoparticles in the dispersion, the grown layer exhibits a noteworthy higher wear resistance respect to that of the DLC reference film. More precisely, in this case, the Cr-DLC coating undergoes ten times longer wear process than the reference DLC coating. However, it is important to indicate that in samples grown using more concentrated dispersions (> 300 ppm), a rapid deterioration of the coating is produced and short lifetimes have been detected, attributed to the large contribution of metal to the transfer layer.

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Deposition and some properties of carbide/amorphous carbon nanocomposites for tribological application

Cited by 42 publications

References 9 publications

The influence of structure changes in the properties of TiCxOy decorative thin films

The influence of structure changes in the properties of TiCxOy decorative thin films

Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH4 gas

Improving the tribological properties of DLC (Fullerene-like) films grown by ECR-CVD with metal nanoparticles incorporation

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