2004
DOI: 10.1021/cm035287o
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Deposition of Bismuth Chalcogenide Thin Films Using Novel Single-Source Precursors by Metal-Organic Chemical Vapor Deposition

Abstract: The metal-organic compounds, Bi[(EPR 2 ) 2 N] 3 (E ) S, Se; R ) Ph, i Pr), have been synthesized and used as single-source precursors for the deposition of bismuth chalcogenide thin films via low-pressure and aerosol-assisted metal-organic chemical vapor deposition. Crystalline thin films of rhombohedral Bi 2 Se 3 (using Bi[(SeP i Pr 2 ) 2 N] 3 ), hexagonal BiSe (using Bi[(SePPh 2 ) 2 N] 3 ), and orthorhombic Bi 2 S 3 (using Bi[(SPR 2 ) 2 N] 3 ) have been deposited on glass substrates. Films have been characte… Show more

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Cited by 123 publications
(71 citation statements)
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“…[11,12] The di-chalcogenoimido-diphosphinto bismuth compounds, Bi[(EPR 2 ) 2 N] 3 (E = S, Se; R = Ph, iPr), were found to be ideal www.zaac.wiley-vch.de ARTICLE for use as single-source precursors as they are air-stable and readily obtainable in good synthetic yields. [13] The diselenoimido-diphosphinato ligand can also stabilize a wide range of metal coordination spheres including alkali metals, [14][15] group 12, [16] group 13, [17,18] group 14, [19,20,16] group 15, [21] group 16, [22,23] transition metals (V and Cr, [24] Mn [25,26] and Re, [27] Ru, Rh, Ir, [15,28,29] Os, [30] Co, [31] group 10: Ni, [32] Pd, [32,[33][34][35] Pt, [14,30,34] and group 11: [35] , and rare earth metals. [36,37] This could be due to the flexible nature of the ligand moieties, which adopt to several metallacyclic rings depending upon the coordination to the central metal atom.…”
Section: Introductionmentioning
confidence: 99%
“…[11,12] The di-chalcogenoimido-diphosphinto bismuth compounds, Bi[(EPR 2 ) 2 N] 3 (E = S, Se; R = Ph, iPr), were found to be ideal www.zaac.wiley-vch.de ARTICLE for use as single-source precursors as they are air-stable and readily obtainable in good synthetic yields. [13] The diselenoimido-diphosphinato ligand can also stabilize a wide range of metal coordination spheres including alkali metals, [14][15] group 12, [16] group 13, [17,18] group 14, [19,20,16] group 15, [21] group 16, [22,23] transition metals (V and Cr, [24] Mn [25,26] and Re, [27] Ru, Rh, Ir, [15,28,29] Os, [30] Co, [31] group 10: Ni, [32] Pd, [32,[33][34][35] Pt, [14,30,34] and group 11: [35] , and rare earth metals. [36,37] This could be due to the flexible nature of the ligand moieties, which adopt to several metallacyclic rings depending upon the coordination to the central metal atom.…”
Section: Introductionmentioning
confidence: 99%
“…Bi 2 Se 3 is one of the important group V-VI binary compounds. Bi 2 Se 3 films have been prepared by various methods such as electrodeposition [3][4], chemical deposition [5][6][7][8], solvo thermalization [9], successive ionic layer adsorption and reaction [10], thermal evaporation [11], electroless solution growth process [12], reactive evaporation [13], compound evaporation [14], chemical vapor deposition (CVD) [15], and metal organic CVD (MOCVD) [16]. Among these methods, electrodeposition is a simple and inexpensive one for the preparation of thin films.…”
Section: Introductionmentioning
confidence: 99%
“…The primary focus has been the coordination chemistry of these bidentate ligands, and several reviews that provide details of the complexes of 1 with a diverse array of main group, lanthanide and transition metals have been published. [3][4][5] A significant recent application of these complexes, particularly in the case of the selenium derivative (1, E = Se, R = i Pr), has been as single-source precursors for the generation of metal selenides in the form of semiconducting thin films [6][7][8][9][10][11][12][13][14][15][16][17] or quantum dots 18 via CVD or solvothermal processes.…”
Section: Introductionmentioning
confidence: 99%