Deposition of diamond-like carbon films on interior surface of long and slender quartz glass tube by enhanced glow discharge plasma immersion ion implantation

Xu, Yi; Li, L.H.; Chu, Paul K.

doi:10.1016/j.surfcoat.2014.12.053

Cited by 12 publications

(2 citation statements)

References 20 publications

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“…Figure 7 displays the Raman spectra between 1000 and 1800 cm −1 for Cr-DLC films. In general, the Raman spectra can be fitted by two Gaussian distributions: one centered at about 1350 cm −1 , corresponding to the D peak of the disordered structure; and the another one centered at about 1580 cm −1 , related to the G peak of the graphite structure [25][26][27]. The integrated intensity ratio of the D and G band, I D /I G , can be correlated with the C-C sp 3 /sp 2 bonding ratio [28].…”

Section: Effect Of Set Values On the Microstructurementioning

confidence: 99%

Effect of Cr Atom Plasma Emission Intensity on the Characteristics of Cr-DLC Films Deposited by Pulsed-DC Magnetron Sputtering

Xia

2020

Coatings

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A pulsed-dc (direct current) magnetron sputtering with a plasma emission monitor (PEM) system was applied to synthesize Cr-containing hydrogenated amorphous diamond-like carbon (Cr-DLC) films using a large-size industrial Cr target. The plasma emission intensity of a Cr atom at 358 nm wavelength was characterized by optical emission spectrometer (OES). C2H2 gas flow rate was precisely adjusted to obtain a stable plasma emission intensity. The relationships between Cr atom plasma emission intensity and the element concentration, cross-sectional morphology, deposition rate, microstructure, mechanical properties, and tribological properties of Cr-DLC films were investigated. Scanning electron microscope and Raman spectra were employed to analyze the chemical composition and microstructure, respectively. The mechanical and tribological behaviors were characterized and analyzed by using the nano-indentation, scratch test instrument, and ball-on-disk reciprocating friction/wear tester. The results indicate that the PEM system was successfully used in magnetron sputtering for a more stable Cr-DLC deposition process.

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Section: Effect Of Set Values On the Microstructurementioning

confidence: 99%

Effect of Cr Atom Plasma Emission Intensity on the Characteristics of Cr-DLC Films Deposited by Pulsed-DC Magnetron Sputtering

Xia

2020

Coatings

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“…However, conventional coating methods have difficulties in implementing and fabricating uniform films inside a small tube, especially those with large aspect ratios. Methods of vapour deposition [ 19 ] face the challenge of concentration gradient of vapour; while electroplating [ 20 ] faces the challenges of the uniformity requirements of electric field and that of concentration of the solution. For an instant process of electrical explosion, there is not enough time to develop a uniform film structure.…”

Section: Introductionmentioning

confidence: 99%

Hypergravity-assisted chemical liquid deposition of nano-granular film on the inner surface of a quartz tube

Shen

et al. 2018

R. Soc. open sci.

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Transparent tubes with functions of heating and temperature measurement are badly required in the visualization investigation of two-phase flows and flow-boiling heat transfer. In order to prepare such a tube, we introduced a cost-effective and energy-efficient procedure of hypergravity-assisted chemical liquid deposition (HACLD) to produce transparent and conductive silver (Ag) films on the inner surfaces of quartz tubes, typically 50 mm in length and 8 mm in inner diameter with a set-up that was designed and built for this purpose. Precursors of organometallic Ag precursor solutions were prepared by dissolving silver citrate and 1,2-diaminopropane in 2-methoxyethanol with required concentration for the chemical liquid deposition process. Semitransparent and conductive Ag films formed inside the required quartz tubes under specific heating process in hypergravity. One of the films was about 47 nm in thickness, 23 Ω per square sheet resistance, and 30% optical transmittance. This attempt may pave a way for the understanding of the film forming mechanism in hypergravity, and the development of a film preparation technology of HACLD.

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Self-enhanced plasma discharge effect in the deposition of diamond-like carbon films on the inner surface of slender tube

Luo

et al. 2017

Applied Surface Science

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Deposition of diamond-like carbon films on interior surface of long and slender quartz glass tube by enhanced glow discharge plasma immersion ion implantation

Cited by 12 publications

References 20 publications

Effect of Cr Atom Plasma Emission Intensity on the Characteristics of Cr-DLC Films Deposited by Pulsed-DC Magnetron Sputtering

Effect of Cr Atom Plasma Emission Intensity on the Characteristics of Cr-DLC Films Deposited by Pulsed-DC Magnetron Sputtering

Hypergravity-assisted chemical liquid deposition of nano-granular film on the inner surface of a quartz tube

Self-enhanced plasma discharge effect in the deposition of diamond-like carbon films on the inner surface of slender tube

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