Deposition of Diamond-like Carbon Films using Graphite Sputtering in Neon Dense Plasma

Zeb, Shaista; Qayyum, A.; Sadiq, Muhammad; Shafiq, Muhammad; Waheed, A.; Zakaullah, M.

doi:10.1007/s11090-006-9040-4

Cited by 13 publications

(2 citation statements)

References 27 publications

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“…The result is an increase in the population of carbon ions. In the last few years, the literature reports using an alternative for Ar gases to increase the ionization degree of magnetron plasma [55][56][57][58][59].…”

Section: Resultsmentioning

confidence: 99%

The Amorphous Carbon Thin Films Synthesized by Gas Injection Magnetron Sputtering Technique in Various Gas Atmospheres

et al. 2023

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This work presents the potential for using pulsed gas injection to produce amorphous carbon films. In this experiment, the frequency of injecting small amounts of gas was used to control the pressure amplitudes, thus achieving the conditions of plasma generation from stationary, through quasi-stationary, to pulsed oscillations of pressure. In addition, we used various gases and their mixtures, an alternative to argon. In the experiment, we studied the energy state of the plasma. The films were examined for phase and chemical composition, surface morphology, and optical and mechanical properties. We determined low-frequency pulsed gas injections to be conditions favorable for C(sp3) − C(sp3) bond formation. The plasma generated by gas injections is better ionized than that generated by static pressure. Pulsed conditions favor the plasma species to retain their kinetic energy, limiting the probability of intermolecular collision events. Since helium has a relatively high ionization energy, it is a practical addition to sputtering gas because of the increasing sp3 content in the films. The electrons created by helium ionization improve the plasma’s ionization degree.

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Section: Resultsmentioning

confidence: 99%

The Amorphous Carbon Thin Films Synthesized by Gas Injection Magnetron Sputtering Technique in Various Gas Atmospheres

et al. 2023

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“…Neon gas has been used in some applications such as synthetization of nanomaterial [21], deposition of diamond-like carbon films [22], creation of nanostructure target [23], nanostructured Fe thin films [24] and so on. Such applications require the use of a proper anode top geometry for more intensive and efficient ion emission and exposures.…”

Section: Jinst 13 P03011mentioning

confidence: 99%

Effects of anode geometry on forward wide-angle neon ion emissions in 3.5 kJ plasma focus device by novel mega-size panorama polycarbonate image detectors

2018

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Forward wide-angle neon ion emissions in a 3.5 kJ plasma focus device (PFD) were studied using 5 different anode top geometries; hollow-end cylinder, solid triangle, solid hemisphere, hollow-end cone and flat-end cone. Position-sensitive mega-size panorama polycarbonate ion image detectors (MS-PCID) developed by dual-cell circular mega-size electrochemical etching (MS-ECE) systems were applied for processesing wide-angle neon ion images on MS-PCIDs exposed on the PFD cylinder top base under a single pinch shot. The images can be simply observed, analyzed and relatively quantified in terms of ion emission angular distributions even by the unaided eyes. By analysis of the forward neon ion emission images, the ion emission yields, ion emission angular distributions, iso-fluence ion contours and solid angles of ion emissions in 4π PFD space were determined. The neon ion emission yields on the PFD cylinder top base are in an increasing order ~2.1×10 9 , ~2.2 ×10 9 , ~2.8×10 9 , ~2.9×10 9 , and ~3.5×10 9 neon ions/shot for the 5 stated anode top geometries respectively. The panorama neon ion images as diagnosed even by the unaided eyes demonstrate the lowest and highest ion yields from the hollow-end cylinder and flat-end cone anode tops respectively. Relative dynamic qualitative neon ion spectrometry was made by the unaided eyes demonstrating relative neon ion energy as they appear. The study also demonstrates the unique power of the MS-PCID/MS-ECE imaging system as an advanced state-of-the-art ion imaging method for wide-angle dynamic parametric studies in PFD space and other ion study applications. K: Nuclear instruments and methods for hot plasma diagnostics; Plasma diagnosticscharged-particle spectroscopy; Heavy-ion detectors; Particle tracking detectors (Solid-state detectors)1Corresponding author.

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Performance of brazed diamond wheels fabricated in hydrogen/methane plasmas or a vacuum

2012

Int J Adv Manuf Technol

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Deposition of Diamond-like Carbon Films using Graphite Sputtering in Neon Dense Plasma

Cited by 13 publications

References 27 publications

The Amorphous Carbon Thin Films Synthesized by Gas Injection Magnetron Sputtering Technique in Various Gas Atmospheres

The Amorphous Carbon Thin Films Synthesized by Gas Injection Magnetron Sputtering Technique in Various Gas Atmospheres

Effects of anode geometry on forward wide-angle neon ion emissions in 3.5 kJ plasma focus device by novel mega-size panorama polycarbonate image detectors

Performance of brazed diamond wheels fabricated in hydrogen/methane plasmas or a vacuum

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