Deposition rate and three-dimensional uniformity of RF plasma deposited SiOx films

Hegemann, Dirk; Brunner, Herwig; Oehr, Christian

doi:10.1016/s0257-8972(01)01100-8

Cited by 60 publications

(38 citation statements)

References 20 publications

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“…The absorption bands at 2965 and 1260 cm 21 can be assigned to CH 3 stretching and CH 3 deformation vibrations respectively. The large broad absorption band at 1020 cm 21 is due to the presence of Si-O-Si bonds, while the peak at 850 cm 21 can be attributed to Si-C and CH 3 rocking vibrations. The absorption band at 800 cm 21 is due to CH 3 rocking vibrations and Si-O-Si stretching vibrations.…”

Section: Fourier Transform Infrared Spectroscopy Resultsmentioning

confidence: 99%

“…Hexamethyldisiloxane plasma-polymerised thin films can be assayed for a large number of applications in rather different fields such as protective anti-scratch coatings on plastic substrates, barrier films for food and pharmaceutical packaging, corrosion protection layers, coatings for biocompatible materials and low-k dielectric layers for microelectronic applications. [21][22][23] Tetramethyldisiloxane (TMDSO) is another organosilicon monomer with a structure closely related to HMDSO. Nevertheless this closely related structure, the use of TMDSO as monomer has been described less in literature, [24][25][26][27] although one can expect that this monomer could also lead to deposited layers with useful and interesting properties.…”

Section: Introductionmentioning

confidence: 99%

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Plasma polymerisation of siloxanes at atmospheric pressure

Morent

Vlierberghe

Dubruel

et al. 2011

Surface Engineering

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This work deals with the plasma polymerisation of two siloxane precursors, [hexamethyldisiloxane (HMDSO) and tetramethyldisiloxane (TMDSO)] with an atmospheric pressure pseudoglow dielectric barrier discharge operated in argon and an argon-air mixture. The influence of gas composition and precursor type on the physical and chemical properties of the deposited films is examined in detail using contact angle measurements, Fourier transform infrared spectroscopy (FTIR) and atomic force microscopy (AFM). Results clearly show that precursor type as well as gas composition has an profound impact on film growth rate and chemical composition of the deposited films. Plasma polymerisation of both siloxane precursors in argon leads to the formation of hydrophobic polymers consisting of a Si-O-Si backbone, while for deposition in an argon-air mixture, hydrophilic inorganic silica-like coatings are obtained

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Section: Fourier Transform Infrared Spectroscopy Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Plasma polymerisation of siloxanes at atmospheric pressure

Morent

Vlierberghe

Dubruel

et al. 2011

Surface Engineering

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“…CH 4 is introduced through a shower head integrated in the upper, grounded electrode yielding a vertical gas flow towards the lower RF-driven electrode of the same size (A dep = 29 Â 39 cm 2 ). Both electrodes are part of the outer recipient separated by a 8.5 cm high, rectangular frame made of polycarbonate shielded inside with glass [16]. Thus, no bias voltage is produced and the plasma fills the whole vacuum chamber providing a defined geometry and well-defined plasma conditions.…”

Section: Methodsmentioning

confidence: 99%

Activation energy of an asymmetrical, radio frequency discharge with methane

Hegemann

Schütz

2005

Thin Solid Films

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“…The presence of a high concentration of methyl groups encourages the hydrophobic properties of the coating. Many studies have likewise observed a similar effect of power on wettability in a plasma polymerization process [65,146,147].…”

Section: ïV-3-optimization Of Plasma Process Parametersmentioning

confidence: 68%

Development of nano-structured icephobic surfaces based on plasma polymerization /

Mobarakeh¹

2014

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Accumulated ice on exposed surfaces leads to operational difficulties and extensive maintenance for power transmission lines, antennas, aircraft, ships, and ground transportation vehicles.In the present study, the low pressure plasma polymerized Hexamethyldisiloxane (PP-HMDSO) film is deposited on aluminum surfaces to create a superhydrophobic coating with icephobic properties. Prior to the deposition of this low surface energy coating, aluminum surfaces were anodized or immersed in boiling water to make micro/nano structured surfaces.Plasma parameters were optimized in order to find the best optimum conditions for having high static contact angle and low contact angle hysteresis. Hence, the Grey-based Taguchi method was used as one of the Design of Experiment (DOE) techniques. The stability of coatings was studied under accelerated aging conditions such as UV degradation, immersion in distilled water and different pH solutions, and several icing/deicing cycles. It was observed that the PP-HMDSO coatings are quite stable against UV exposure and immersion in distilled water. However, the icephobicity of the PP-HMDSO coating deposited on the anodized aluminum decreased after fifteen icing/de-icing cycles.The stability of the developed coating was improved against several icing/de-icing cycles by increasing the deposition time of plasma polymerized coating from 15 to 25 minutes. The results showed that increasing the deposition time of plasma polymerization leads to decrease of the ice adhesion strength of coatings on anodized aluminum while it has no significant effect on the PP-HMDSO coating deposited on a water-treated aluminum surface. Finally, the superhydrophobic PP-HMDSO coating also provides anti-corrosion protection for the aluminum substrate.

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Deposition rate and three-dimensional uniformity of RF plasma deposited SiOx films

Cited by 60 publications

References 20 publications

Plasma polymerisation of siloxanes at atmospheric pressure

Plasma polymerisation of siloxanes at atmospheric pressure

Activation energy of an asymmetrical, radio frequency discharge with methane

Development of nano-structured icephobic surfaces based on plasma polymerization /

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