2009
DOI: 10.1016/j.vacuum.2009.01.064
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Depth distributions of elements in monoatomic and compound coatings deposited onto copper and silicon by IBAD

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Cited by 6 publications
(6 citation statements)
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“…A proton microbeam (μ PIXE) with an initial energy of 1.4 MeV was used on the basis of an IAP electrostatic accelerator (Sumy) with a beam size of 0.5 μm (a charge of 3 × 10 -10 C/pixel, a 50 × 50 scan pattern, and a scanning pitch of 0.5 μm) [10].…”
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“…A proton microbeam (μ PIXE) with an initial energy of 1.4 MeV was used on the basis of an IAP electrostatic accelerator (Sumy) with a beam size of 0.5 μm (a charge of 3 × 10 -10 C/pixel, a 50 × 50 scan pattern, and a scanning pitch of 0.5 μm) [10].…”
mentioning
confidence: 99%
“…This can be attributed to the two stage pattern of for mation of the phase composition of nanostructured multilayer coatings [9][10][11][13][14][15]. At the onset of growth of Mo 2 N, the determining factor for nucle ation is the atomic sequence of the basic TiN lattice by local epitaxy.…”
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“…The TiAlN and TiSiN nanocomposites consisting of TiN nanocrystals embedded in the amorphous AlN or Si 3 N 4 phases have exhibited a super hardness and excellent thermal stability, being widely applied in dry and high-speed cutting treatments [10]. The TiCrN nanocomposite is also of great interest from the point * corresponding author; e-mail: komarovF@bsu.by of view of practical applications [11]. The goal of this research is the investigation of a correlation between the composition and structure of the coating and its mechanical and nanotribological properties.…”
Section: Introductionmentioning
confidence: 99%