2013
DOI: 10.1007/s10812-013-9738-z
|View full text |Cite
|
Sign up to set email alerts
|

Depth profile analysis of nanometric layers by laser-induced breakdown spectroscopy

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1

Citation Types

0
3
0

Year Published

2017
2017
2023
2023

Publication Types

Select...
4

Relationship

0
4

Authors

Journals

citations
Cited by 4 publications
(3 citation statements)
references
References 18 publications
0
3
0
Order By: Relevance
“…LIBS is laser‐based atomic emission spectroscopy for the qualitative and quantitative multielemental analysis of materials and devices. [ 237,238 ] Although laser is also used for surface ablations in LA–ICP–MS, the underlying mechanism is very different in the case of LIBS. Figure 17 a,b shows the schematic design of a LIBS setup and its working principle.…”
Section: Interface‐sensitive Techniquesmentioning
confidence: 99%
“…LIBS is laser‐based atomic emission spectroscopy for the qualitative and quantitative multielemental analysis of materials and devices. [ 237,238 ] Although laser is also used for surface ablations in LA–ICP–MS, the underlying mechanism is very different in the case of LIBS. Figure 17 a,b shows the schematic design of a LIBS setup and its working principle.…”
Section: Interface‐sensitive Techniquesmentioning
confidence: 99%
“…It is well known that the LIBS can be applied to the depth analysis of elements in solid materials [32][33][34][35]. The examination on the distribution of elements including light elements is also important to characterize the solid materials.…”
Section: Depth Analysis Of C By Libsmentioning
confidence: 99%
“…Another approach is the repetitive ablation of material with several pulses at the same location while monitoring the change in the plasma signal. This can be done either with nanosecond pulses [7,8,9,10], nanosecond double pulses [6,11] or femtosecond pulses [2,12,13]. While a nanosecond laser is generally used in LIBS setups, ultrashort pulse lasers (≤10 ps) create a much more defined ablation per pulse and show a better depth resolution [13].…”
Section: Introductionmentioning
confidence: 99%