Depth profile of residual stress in metal-ion implanted TiN coatings

Rafaja, David; Valvoda, V.; Perry, A.J.; Treglio, James R.

doi:10.1016/s0257-8972(97)00013-3

Cited by 67 publications

(29 citation statements)

References 14 publications

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“…18 Amorphization has been reported to occur after ion implantation of PVD TiN, 19,20 whereas no such response has been seen for CVD material implanted with a range of ions. 12,21,22 Since amorphization due to ion bombardment occurs in response to the accumulation of the damage produced (e.g., the formation of vacancies and interstitials by the displacement of target atoms) this is consistent with the lower baseline defect levels present in CVD coatings. However, it must be questioned whether it is possible to amorphize a material such as TiN in which the bonding is substantially metallic.…”

Section: Introductionmentioning

confidence: 59%

“…Details of the x-ray diffraction measurement methods applied to these samples can be found elsewhere. 22 Nanoindentation experiments were performed using a Nanoindenter II (Nanoinstruments, Knoxville, TN) fitted with a Berkovich diamond indenter. Peak loads in the range 1 to 500 mN were used and the hardness obtained from the unloading part of the load-displacement curves using the method of Oliver and Pharr.…”

Section: Methodsmentioning

confidence: 99%

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Mechanism of improvement of TiN-coated tool life by nitrogen implantation

et al. 2001

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The life of TiN-coated tools can be improved by a post-coating ion implantation treatment, but the mechanism by which this occurs is still not clear. Nitrogen implantation of both physical-vapor-deposited TiN and CVD TiN leads to surface softening as the dose increases, which has been attributed to amorphization. In this study a combination of transmission electron microscopy and atomic force microscopy was used to characterize the microstructure of implanted TiN coatings on cemented carbide for comparison with mechanical property measurements (nanoindentation, residual stress, etc.), made on the same samples. Ion implantation leads to a slight reduction in the grain size of the TiN in the implanted zone, but there is no evidence for amorphization. Surface softening is observed for physical-vapor-deposited TiN, but this is probably due to a combination of changes in surface composition and the presence of a layer of bubbles generated by the very high implantation doses used.

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Section: Introductionmentioning

confidence: 59%

Section: Methodsmentioning

confidence: 99%

Mechanism of improvement of TiN-coated tool life by nitrogen implantation

et al. 2001

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“…Therefore, whole diffraction patterns can be measured at a low and nearly constant penetration depths. Consequently, GAXRD is a technique suitable to study depth profiles of structure parameters near the sample surface, because X-ray diffraction yields the mean values of structure parameters averaged over the whole layer thickness taking into account the absorption of radiation [8] …”

Section: Overview Of Experimental Techniquesmentioning

confidence: 99%

X-Ray Diffraction and X-Ray Reflectivity Applied to Investigation of Thin Films

Rafaja

Advances in Solid State Physics

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Abstract. An overview of X-ray scattering methods used for analysis of the real structure of thin films is presented that includes conventional diffraction, glancing angle X-ray diffraction, X-ray reflectivity measurement and grazing incidence Xray diffraction. The capability of the above techniques is illustrated on two typical examples: investigation of real structure of polycrystalline thin films and study of interface morphology and atomic ordering in periodic multilayers.

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“…[18][19][20], which is signifi- cantly shallower than the predicted range of He ions (1000 nm) according to the SRIM calculations. Although we estimate X-ray penetration depth using both the critical angle formula [21] and the geometric method [22], we must state these are only estimated. Upon He ion irradiation, all the diffraction peaks remained as in the pristine SrTiO 3 GIXRD patterns and no apparent diffuse scattering is observed, indicating that SrTiO 3 are not undergoing amorphous at a peak radiation dose of 5 dpa.…”

Section: +mentioning

confidence: 99%

Irradiation study on Sr_n+1Ti_nO_3n+1 Ruddlesden‐Popper phases synthesized by hot‐forging

Tang

Fuierer

Dickens

et al. 2013

Phys. Status Solidi C

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The hot‐forging technique was used to obtain both the n = 2 (Sr3Ti2O7) and n = ∞ (SrTiO3) members of Ruddlesden‐Popper phase Srn+1TinO3n+1. Pure phase and high density (>95% theoretical) materials were achieved using this technique. These polycrystalline samples were irradiated with 200 keV He ions to a fluence of 2×1021 ion/m2 (corresponding to a peak dose at 5 dpa) at room temperature to study radiation damage effects. Microstructural investigation on pristine and irradiated samples was performed using grazing incidence X‐ray diffraction (GIXRD) and transmission electron microscopy (TEM). Three phenomena are revealed upon comparing prisXtine versus irradiated samples. First, both compounds interplanar lattice spacings increased after irradiation. Second, peak broadening possibly suggests incredibly small grain due to irradiation. Third, experiment results revealed an amorphization in the irradiated Sr3Ti2O7, while no amorphization was observed in irradiated SrTiO3. (© 2013 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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Depth profile of residual stress in metal-ion implanted TiN coatings

Cited by 67 publications

References 14 publications

Mechanism of improvement of TiN-coated tool life by nitrogen implantation

Mechanism of improvement of TiN-coated tool life by nitrogen implantation

X-Ray Diffraction and X-Ray Reflectivity Applied to Investigation of Thin Films

Irradiation study on Sr_n+1Ti_nO_3n+1 Ruddlesden‐Popper phases synthesized by hot‐forging

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Depth profile of residual stress in metal-ion implanted TiN coatings

Cited by 67 publications

References 14 publications

Mechanism of improvement of TiN-coated tool life by nitrogen implantation

Mechanism of improvement of TiN-coated tool life by nitrogen implantation

X-Ray Diffraction and X-Ray Reflectivity Applied to Investigation of Thin Films

Irradiation study on Srn+1TinO3n+1 Ruddlesden‐Popper phases synthesized by hot‐forging

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Irradiation study on Sr_n+1Ti_nO_3n+1 Ruddlesden‐Popper phases synthesized by hot‐forging