Advances in Solid State Physics
DOI: 10.1007/3-540-44946-9_23
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X-Ray Diffraction and X-Ray Reflectivity Applied to Investigation of Thin Films

Abstract: Abstract. An overview of X-ray scattering methods used for analysis of the real structure of thin films is presented that includes conventional diffraction, glancing angle X-ray diffraction, X-ray reflectivity measurement and grazing incidence Xray diffraction. The capability of the above techniques is illustrated on two typical examples: investigation of real structure of polycrystalline thin films and study of interface morphology and atomic ordering in periodic multilayers.

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Cited by 6 publications
(5 citation statements)
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“…Thus, it is proposed that a relatively crystalline FeS layer is formed between the substrate and the MoS 2 film. The penetration depth for GXRD is on the order of 1−2 μm deep vs XPS, which penetrates only a few nanometers below the surface . This is consistent with why FeS is observed in the former measurement, but not the latter.…”
Section: Discussionsupporting
confidence: 82%
“…Thus, it is proposed that a relatively crystalline FeS layer is formed between the substrate and the MoS 2 film. The penetration depth for GXRD is on the order of 1−2 μm deep vs XPS, which penetrates only a few nanometers below the surface . This is consistent with why FeS is observed in the former measurement, but not the latter.…”
Section: Discussionsupporting
confidence: 82%
“…A 1.5 deg. angle of incidence gave a 150 nm layer sensitivity 77-84% using kinematical diffraction theory (This calculation uses the formula derived by Rafaja [25] where it is assumed that the reflection intensity from a layer is given by = exp{− ((1/ sin( incident )) + (1/ sin( exit )))} .…”
Section: Methodsmentioning
confidence: 99%
“…This technique is commonly called glancing-angle X-ray diffraction (GAXRD). At small angles of incidence, the penetration depth of the radiation into the thin film is substantially reduced, [4] which increases the scattering power of the thin film. Another advantage of GAXRD is that individual diffraction lines are recorded at different angles between the diffraction vector and the sample surface normal direction (on crystallographic planes having different inclinations from the sample surface), which yields information on the dependence of the microstructure parameters on the macroscopic direction.…”
Section: Functional Cubic Thin Films ð a Structure Viewmentioning
confidence: 99%