Design, analysis and experimental investigations of a high precision flexure-based microgripper for micro/nano manipulation

Das, Tilok Kumar; Shirinzadeh, Bijan; Ghafarian, Mohammadali; Al-Jodah, Ammar; Zhong, Yongmin; Smit, Julian

doi:10.1016/j.mechatronics.2020.102396

Cited by 48 publications

(17 citation statements)

References 37 publications

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“…However, a common shortcoming of the aforementioned microgrippers is the relatively low natural frequency (i.e., 70 Hz and 70.7 Hz, respectively) and massive structure. Later, the lever, bridge, and parallelogram mechanisms were integrated in a symmetrical microgripper, which obtained a natural frequency of 1044 Hz [17]. Such a value of natural frequency is much higher than those of the previously designed microgrippers.…”

Section: Introductionmentioning

confidence: 91%

“…Previous studies have introduced plentiful types of compliant microgrippers based on the piezoelectric actuator [12][13][14][15][16][17][18][19][20][21][22][23][24][25][26][27][28]. For example, the pseudo-rigid-body model (PRBM) and finite element analysis (FEA) techniques were combined to develop multiple microgrippers with a gripping range of about 100 µm in [14].…”

Section: Introductionmentioning

confidence: 99%

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Design and Testing of a New Piezoelectric-Actuated Symmetric Compliant Microgripper

Lyu

2022

Actuators

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Precise and stable operations in micromanipulation and microassembly require a high-performance microgripper. To improve the predominant static and dynamic characteristics, a novel piezoelectric-actuated compliant microgripper is designed, analyzed, and tested in this paper. The microgripper realizes a large gripping stroke by integrating a compliant bridge mechanism, an L-shaped mechanism, and a levered parallelogram mechanism. Optimization technology based on response surface analysis is applied to demonstrate the influence of structural parameters on the microgripper performance. Simulation results of finite element analysis reveal the superior performance of the designed microgripper in terms of gripping displacement, mechanism stiffness, equivalent stress, and natural frequency. A gripper prototype has been fabricated, and experimental studies have been conducted to test the microgripper’s physical properties. Experimental results show that the microgripper can grasp micro-objects with a maximum jaw motion stroke of 312.8 μm, natural frequency of 786 Hz, motion resolution of ±0.6 μm, and force resolution of ±1.69 mN. The gripping tests of an optical fiber with a diameter of 200 μm and a metal sheet with a thickness of 100 μm have been performed to demonstrate its gripping capability with position and force control.

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Section: Introductionmentioning

confidence: 91%

Section: Introductionmentioning

confidence: 99%

Design and Testing of a New Piezoelectric-Actuated Symmetric Compliant Microgripper

Lyu

2022

Actuators

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“…The performance of micromanipulation is closely related to its driving mode. According to its driving mode, it is mainly divided into piezoelectric driving [17][18][19], electromagnetic driving [9], electrostatic driving [20], shape memory alloy [21,22], electrothermal driving [23], motor driving [24], etc. However, the cooling and heating time is needed in the manipulation process of electrothermal driven micro-gripper, and the response speed is slow; electromagnetic drive is difficult to reduce its scale, which is greatly affected by the external magnetic field, and due to the required components, it may lead to slow manipulation speed and reduce the system accuracy [25]; although piezoelectric drive has the advantages of high precision, light structure and fast response time [26], its opening-closing displacement is generally small, which is suitable for smaller objects and has the problem of hysteresis; the clamping force and opening-closing displacement of electrostatic driving are small; vacuum adsorption has higher requirements on the surface of objects; although the wind blowing method can effectively reduce the mechanical damage to the wires, the airflow is easy to interfere with the rest of the wires, resulting in operation failure.…”

Section: Introductionmentioning

confidence: 99%

Design, Analysis and Experimental Investigations of a Double-Arm Based Micro-Gripper for Thin and Flexible Metal Wires Manipulation

Wang

Chen

2022

Micromachines

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A robotic system for the automatic wire pulling of coreless motor winding is designed, including the design of an opening-closing control system and a micro-gripper’s tip structure with a double-armed elastic-beam structure for the support part and an enveloping clamping structure for the tip part. The micro-gripper captures the electrode wire from the root, encircles the wire after the envelope region is closed, and the thin and flexible electrode wire is pulled to the top of the electrode pad by the movement of the micro-gripper and released. The mechanical index of the micro-gripper is simulated to obtain the optimal structural parameters. The experimental results show that the electrode wire’s maximum bearing force is about 0.3 N. Under this reaction force, the deformation of the tip-envelope region of the micro-gripper is about 27.5 μm, which is sufficient for electrode wire pulling micro-manipulation. By comparison with the steel micro-gripper, the silicon micro-gripper has more advantages in shape integrity, machinability and mechanical properties.

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“…The trade-off between motion stroke precision and mechanical bandwidth is known to be unavoidable; it exists because nanoscale-precision motion is realized through the elastic deformation of compliant mechanisms [ 11 , 12 , 13 ]. Various designs of nanopositioners with large workspaces (i.e., millimeter range) have been developed at the cost of a low stiffness [ 14 , 15 , 16 ], which reduced the load-carrying capability and response speed. Conversely, more flexibility also poses a significant challenge to high-precision nanopositioning control.…”

Section: Introductionmentioning

confidence: 99%

Design and Analysis of a Novel Flexure-Based Dynamically Tunable Nanopositioner

2021

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Various tools, such as biomedical manipulators, optical aligners, and ultraprecision manufacturing tools, implement nanopositioners that must be dynamically tunable to satisfy the requirements of different working conditions. In this paper, we present the design and analysis of a flexure-based nanopositioner with dynamically tunable characteristics for the implementation of a high-performance servomechanism. The nanopositioner is composed of four flexure beams that are positioned in parallel and symmetric configurations sandwiched between magnetorheological elastomers (MREs). The properties of MREs impart dynamicity to the nanopositioner, allowing the workspace, stiffness, and damping characteristics in particular to be tuned under the action of an external magnetic field. By utilizing elastic beam theory and electromagnetic field coupling analysis, kinetostatic and dynamic models of the proposed nanopositioner were established to predict the variable stiffness property and dynamically tunable characteristics. The models were validated by performing a finite element analysis. Herein, it is shown that the proposed nanopositioner model can actively adjust the trade-offs between the working range, speed, and sustained load capability by changing the magnetic field. The proposed dynamic tuning method offers new insight into the design of flexure-based nanopositioners for real applications.

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Design, analysis and experimental investigations of a high precision flexure-based microgripper for micro/nano manipulation

Cited by 48 publications

References 37 publications

Design and Testing of a New Piezoelectric-Actuated Symmetric Compliant Microgripper

Design and Testing of a New Piezoelectric-Actuated Symmetric Compliant Microgripper

Design, Analysis and Experimental Investigations of a Double-Arm Based Micro-Gripper for Thin and Flexible Metal Wires Manipulation

Design and Analysis of a Novel Flexure-Based Dynamically Tunable Nanopositioner

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