Design, analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage

Yao, Qing; Dong, Jingyan; Ferreira, Placid M.

doi:10.1016/j.ijmachtools.2006.07.007

Cited by 213 publications

(113 citation statements)

References 24 publications

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“…Due to the characteristics of high force, high stiffness, high resolution and fast response, piezostack is a typical actuator for ultraprecision motion and positioning [1][2][3][4]. A major drawback of conventional piezostack, which limits its applications, is its relatively small deformation range.…”

Section: Introductionmentioning

confidence: 99%

Analysis of the displacement amplification ratio of bridge-type mechanism

Xiang

Fang

et al. 2015

Mechanism and Machine Theory

143

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Section: Introductionmentioning

confidence: 99%

Analysis of the displacement amplification ratio of bridge-type mechanism

Xiang

Fang

et al. 2015

Mechanism and Machine Theory

143

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“…In the literature, Yao et al [73] presented an amplifier that is composed of two serially-jointed parallelogram four-bar linkages ( Figure 6). The input end is located on one bar.…”

Section: Hybrid-type Amplifiermentioning

confidence: 99%

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

2018

Actuators

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Micromanipulation is a hot topic due to its enabling role in various research fields. In order to perform a high precision operation at a small scale, compliant mechanisms have been proposed and applied for decades. In microscale manipulation, micro-/nano-positioning is the most fundamental operation because a precision positioning is the premise of subsequent operations. This paper is concentrated on reviewing the state-of-the-art research on complaint micro-/nano-positioning stage design in recent years. It involves the major processes and components for designing a compliant positioning stage, e.g., actuator selection, stroke amplifier design, connecting scheme of the multi-DOF stage and structure optimization. The review provides a reference to design a compliant micro-/nano-positioning stage for pertinent applications.

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“…These analytical results are obtained by assigning k lever a large value according to the criterion defined in Eq. (23). When no PEA is installed, the estimation error with rigid lever assumption is 42%.…”

Section: Statics Of the Nano-manipulatormentioning

confidence: 99%

“…In literature, many analytical and empirical models have been established for the compliance/stiffness of a single flexure hinge [19][20][21]. In order to improve the performance, multiple flexure hinges are generally combined in various configurations, such as the parallelograms [22][23][24] and the statically indeterminate symmetric (SIS) structures [25]. In these structures, it is common to treat the flexure hinges as flexible, and all the other components as rigid.…”

Section: Introductionmentioning

confidence: 99%

Closed-Form Modeling and Analysis of an XY Flexure-Based Nano-Manipulator

Qin

Zhao

Shirinzadeh

et al. 2018

Chin. J. Mech. Eng.

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Flexure-based mechanisms are widely utilized in nano manipulations. The closed-form statics and dynamics modeling is difficult due to the complex topologies, the inevitable compliance of levers, the Hertzian contact interface, etc. This paper presents the closed-form modeling of an XY nano-manipulator consisting of statically indeterminate symmetric (SIS) structures using leaf and circular flexure hinges. Theoretical analysis reveals that the lever's compliance, the contact stiffness, and the load mass have significant influence on the static and dynamic performances of the system. Experiments are conducted to verify the effectiveness of the established models. If no piezoelectric actuator (PEA) is installed, the influence of the contact stiffness can be eliminated. Experimental results show that the estimation error on the output stiffness and first natural frequency can reach 2% and 1.7%, respectively. If PEAs are installed, the contact stiffness shows up in the models. As no effective method is currently available to measure or estimate the contact stiffness, it is impossible to precisely estimate the performance of the overall system. In this case, the established closed-form models can be utilized to calculate the bounds of the performance. The established closed-form models are widely applicable in the design and optimization of planar flexure-based mechanisms.Keywords: Flexure-based mechanism, Statically indeterminate structure, Dynamics, Lever mechanism, Piezoelectric actuator © The Author(s) 2018. This article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.

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Design, analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage

Cited by 213 publications

References 24 publications

Analysis of the displacement amplification ratio of bridge-type mechanism

Analysis of the displacement amplification ratio of bridge-type mechanism

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

Closed-Form Modeling and Analysis of an XY Flexure-Based Nano-Manipulator

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