Design and analysis of a single-flexure parallelogram mechanism-based X-Y nanopositioning stage

Abstract

This paper presents the design and analysis of a flexure-based X-Y direction translational nanopositioning stage. Mechanism used in this present design has a circular flexure only on the drive end of the mechanism unlike the conventional compliance mechanism, providing advantage of both minimum parasitic motion and also higher bandwidth. Theoretical calculations are carried out to evaluate range and stiffness of the mechanism and further the designed flexure mechanism is analysed for dynamic and static behaviour of mechanism using FEA. Experiments conducted demonstrate that the design has a low cross-coupling of 0.2% of total motion, and a travelling range of 114 × 114 μm. However the mechanism is capable of moving upto 657 μm, which will be tested in our future work. Keywords: flexure mechanism; parallel kinematic; nanopositioning stage; finite element analysis.Reference to this paper should be made as follows: Vithun, S.N., Vinod, P., Narendra Reddy, T. and Shashi Kumar, P.V. (2016) 'Design and analysis of a single-flexure parallelogram mechanism-based X-Y nanopositioning stage', Int.

Evaluation of Stiffness and Parametric Modelling of XY Flexure Mechanism for Precision Applications

“…To achieve huge movement, extend with high precision, the usage of coarse fine estimate system is summed up. One can use a coarse-fine bearing stage, a coarse-fine activation structure, mechanical movement enhancers and even a coarse-fine sensor format [7]. The design of multi DOF uprooting frameworks ends up being extremely contending, in light of the way that the collaboration between the components of the distinctive tomahawks in the system brings about conflicting necessities being constrained on the flexure bearing format, and also on the choice of actuators and sensors [8].…”