Design and Analysis of a Novel MEMS Touch Mode Convex Capacitive Pressure Sensor for Altimeter Applications

Sreekanth, P K; Jindal, Sumit Kumar

doi:10.1142/s1793292022501119

Cited by 4 publications

(1 citation statement)

References 20 publications

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“…The contact capacitive pressure sensor can overcome the nonlinearity shortcomings, which depends on the change of the contact area of the plate to cause the change of capacitance, and has good linearity in the working range as well as small temperature drift. In particular, the contact capacitive pressure sensor can withstand a higher full-scale overload, which is important for micro-pressure measurement considering the high pressure load that may occur during detection [19]. However, this kind of sensor needs to exert a large load to achieve the contact of the plates, and its sensitivity to small pressure is limited.…”

Section: Introductionmentioning

confidence: 99%

Theoretical and experimental investigation on performance enhancement effect for a novel capacitive pressure sensor with double-cavity

Chen

et al. 2023

IEICE Electron. Express

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This study presents the enhanced sensitivity and low temperature drift effect on the performance of a novel double-cavity capacitive pressure sensor for micr-pressure detection. For theoretical analysis, the relative capacitance change of the sensor are formulated by using COMSOL Multiphysics. In experiments, a sensor model is fabricated by 3D printing technology. The obtained result of the sensor having a flexible diaphragm shows the sensitivity is improved by employing additional double-cavity at room temperature. In addition, the temperature drift effect of the designed pressure sensor is measured and examined through comparison with the traditional sensor. The temperature drift effect can be effectively suppressed by adopting the novel structure. It is expected to realize the micro-pressure detection technology which integrates the characteristics of high sensitivity, large linearity range and low temperature drift.

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Section: Introductionmentioning

confidence: 99%

Theoretical and experimental investigation on performance enhancement effect for a novel capacitive pressure sensor with double-cavity

Chen

et al. 2023

IEICE Electron. Express

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Deep‐Learning‐Assisted Piezoresistive Intelligent Glove for Pressure Monitoring and Object Identification

Zhu,

Zhang,

et al. 2024

Adv Materials Technologies

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The array of tactile information processing capabilities is an important index for modern intelligent devices advancing toward a humanoid form, and it greatly improves the recognition of different objects in human‐computer interactions. Herein, a deep‐learning‐assisted intelligent grasping recognition system based on a piezoresistive sensing glove, hardware conditioning, and acquisition circuits, and a multibranch deep‐capsule network is reported. Owing to the multiscale 3D structure of carbon nanotube (CNTs)/carbon fiber (CFs) embedded in polydimethylsiloxane (PDMS), the piezoresistive sensing glove is highly sensitive to the pressure exerted by external objects. The acquired signals are reflected on a hand‐like background map, and a combination of multiple subgraphs is used to build the dataset. A multibranch deep‐capsule network is constructed to encode spatial information while realizing object recognition with an accuracy of 99.4%. Therefore, the proposed intelligent grasping recognition system possesses good human‐robot interaction capabilities, providing a new approach for the development of intelligent robots in the field of perceptual recognition applications.

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Optimal design parameter estimation and analytical investigation of MEMS quadruple touch mode capacitive pressure sensor

Gajula,

Jindal

2024

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Purpose Touch mode capacitive pressure sensors (TMCPS) offer superior sensitivity and linearity in comparison to normal mode CPS and have therefore seen substantial improvements in modeling and construction. This study aims to develop a sensor that is highly robust, with near-linear output characteristics, increased sensitivity and superior overload protection, making it an ideal choice for deployment in harsh industrial environments. Design/methodology/approach The proposed sensor design uses a substrate with a multi-step notch, introducing a new quadruple TMCPS and uses a small deflection model for mathematical analysis. Addition of a multi-step notch to traditional touch mode capacitive sensors results in quadruple touch regions which further enhances its operational range performance. Findings The simulation of diaphragm deflection in response to pressure is carried out by using COMSOL Multiphysics, whereas MATLAB is used for analytical simulations pertaining to variations in capacitance and capacitive sensitivity. Comparing with earlier models, there is a noticeable enhancement in capacitance, experiencing a fivefold increase. The achieved value stands at 50.1 pF, reflecting improved sensitivity for applied pressure ranging from 0 to 2 MPa. Originality/value In existing literature to improve the performance of the single TMCPS, a double-sided TMCPS has been developed. To enhance sensor performance, a substrate with a multi-step notch is proposed. The notch creates four touch regions with varying gap depths, resulting in increased capacitance and capacitive sensitivity.

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Design and Analysis of a Novel MEMS Touch Mode Convex Capacitive Pressure Sensor for Altimeter Applications

Cited by 4 publications

References 20 publications

Theoretical and experimental investigation on performance enhancement effect for a novel capacitive pressure sensor with double-cavity

Theoretical and experimental investigation on performance enhancement effect for a novel capacitive pressure sensor with double-cavity

Deep‐Learning‐Assisted Piezoresistive Intelligent Glove for Pressure Monitoring and Object Identification

Optimal design parameter estimation and analytical investigation of MEMS quadruple touch mode capacitive pressure sensor

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