“…Due to their small volume, low power consumption, large dynamic range, low cost, etc, micro-electro-mechanical system (MEMS) AHSs possess great application potential in attitude control, environmental monitoring and target positioning. A variety of AHSs based on different sensitive principles, including capacitive [17,18], piezoresistive [19,20], piezoelectric [21], optical [22], magnetic [23], resonant approaches [24,25], have been reported. In [26], Moshizi et al developed a flexible hair flow sensor based on piezoresistive vertical graphene nanosheets with a mazelike structure.…”