Design and Analysis of a Novel Fully Decoupled Tri-axis Linear Vibratory Gyroscope with Matched Modes

Xia, Dunzhu; Kong, Lun; Gao, Haiyu

doi:10.3390/s150716929

Cited by 15 publications

(17 citation statements)

References 22 publications

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“…In this case, to eliminate this deviation induced by fabrication error, the assistant stiffness trimming approach need to be developed in this design. This kind of electronic trim technology can be borrowed from the [ 17 , 19 ].…”

Section: Simulation Results and Fabrication Processmentioning

confidence: 99%

“…Thus, the changed capacitances are immune to drive to other modes coupling. In actual operation, a kind of dual channel closed-loop sense circuit will be adopted to suppress quadrature signals well [ 17 ]. For two second-order oscillators, if we adopt the open-loop sense circuit, indeed the frequencies cannot match ideally due to the cross-coupling term.…”

Section: Simulation Results and Fabrication Processmentioning

confidence: 99%

“…Inspired by the above designs, all these merits are utilized here to propose a fully symmetric decoupling triaxial gyroscope structure. In the specific design details, since mode matching is essential to further improve the sensitivity of a triaxial gyroscope, therefore, a fully decoupled triaxial linear vibratory gyroscope with matched modes is proposed [ 17 ].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

A Mode Matched Triaxial Vibratory Wheel Gyroscope with Fully Decoupled Structure

Xia

Kong

Gao

2015

Sensors

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To avoid the oscillation of four unequal masses seen in previous triaxial linear gyroscopes, a modified silicon triaxial gyroscope with a rotary wheel is presented in this paper. To maintain a large sensitivity and suppress the coupling of different modes, this novel gyroscope structure is designed be perfectly symmetrical with a relatively large size of about 9.8 mm × 9.8 mm. It is available for differentially detecting three-axis angular rates simultaneously. To overcome the coupling between drive and sense modes, numerous necessary frames, beams, and anchors are delicately figured out and properly arranged. Besides, some frequency tuning and feedback mechanisms are addressed in the case of post processing after fabrication. To facilitate mode matched function, a new artificial fish swarm algorithm (AFSA) performed faster than particle swarm optimization (PSO) with a frequency split of 108 Hz. Then, by entrusting the post adjustment of the springs dimensions to the finite element method (FEM) software ANSYS, the final frequency splits can be below 3 Hz. The simulation results demonstrate that the modal frequencies in drive and different sense modes are respectively 8001.1, 8002.6, 8002.8 and 8003.3 Hz. Subsequently, different axis cross coupling effects and scale factors are also analyzed. The simulation results effectively validate the feasibility of the design and relevant theoretical calculation.

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Section: Simulation Results and Fabrication Processmentioning

confidence: 99%

Section: Simulation Results and Fabrication Processmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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A Mode Matched Triaxial Vibratory Wheel Gyroscope with Fully Decoupled Structure

Xia

Kong

Gao

2015

Sensors

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“…Thus, some algorithms can be used for reference in order to quicken the process in mode matching. The particle swam optimization (PSO) can be adopted to optimize the beam dimensions and realize the mode matching in Drive Mode, Yaw Mode and Pitch/Roll Mode [ 23 ]. By setting a function of the resonant frequencies in all the drive and sense modes as the objective function, the mode matching process can be converted to the optimization of the established objective function with minimum value by PSO algorithm.…”

Section: Working Principle and Structure Designmentioning

confidence: 99%

Coupling Mechanism Analysis and Fabrication of Triaxial Gyroscopes in Monolithic MIMU

Xia

2017

Micromachines

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A novel fully decoupled micro inertial measurement unit (MIMU) is presented in this paper. The proposed MIMU structure, mostly focusing on the gyroscope unit, is highly symmetrical and can be limited to an area of 10,000 μm × 10,000 μm. Both the tri-axis gyroscope and tri-axis accelerometer structures are fabricated on the same single silicon chip, which can differentially detect three axes’ angular velocities and linear accelerated velocities at the same time. By elaborately arranging different decoupling beams, anchors and sensing frames, the drive and sense modes of the tri-axis gyroscope are fully decoupled from each other. Several dynamic models, including decoupling beams with fabrication imperfections, are established for theoretical analysis. The numerical simulation made by MATLAB shows the structural decoupling of three sense modes, and indicates that the key decoupling beams, which affect the quadrature error, can be improved in design. The whole fabrication process, including silicon on glass (SOG) process, dry/wet etching as well as the methods for improving the fabrication quality, is then shown. Experiments for mode frequency and quality factors of four modes (drive, yaw, pitch and roll) have been performed, and are found to be 455 (6950.2 Hz), 66 (7054.4 Hz), 109 (7034.2 Hz) and 107 (7040.5 Hz) respectively. The analysis and experiment both prove that this novel MIMU has the potential value of further intensive investigation.

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“…There have been two different approaches to measuring three axes of the applied angular rate. (3) One is to assemble three single-axis gyroscopes orthogonally, but the difficulty in orthogonal assembly could cause misalignment that leads to reduced performance, increased packaging cost, and need for additional compensation control.…”

Section: Introductionmentioning

confidence: 99%

Design, Analysis and Experimental Results of Micromachined Single-structure Triaxis Vibratory Gyroscope with Advanced Coupling Mechanism

Seok¹,

Moon²,

Kim³

et al. 2018

Sensors and Materials

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In this work, a novel micromachined monolithic triaxis gyroscope with an advanced anchor mechanism is designed and its structural characteristics are analyzed. Micromachined gyroscopes are usually packed in small packages, causing a high squeeze film damping effect that reduces the quality factor of out-of-plane vibration, resulting in lowered out-of-plane sensitivity. The proposed gyroscope has a four-mass single structure wherein the opposing masses vibrate in the opposite direction perpendicular to the direction they face, with the help of 'tree-shaped' coupling springs. The simulated driving and x-, y-, and z-axis sensing resonant frequencies are 19946, 20227, 20294, and 20361 Hz, respectively. Also, the prototype of the gyroscope was fabricated and tested. It showed a driving Q-factor of 106 and a scale factor of 7 mV/deg/s.

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Design and Analysis of a Novel Fully Decoupled Tri-axis Linear Vibratory Gyroscope with Matched Modes

Cited by 15 publications

References 22 publications

A Mode Matched Triaxial Vibratory Wheel Gyroscope with Fully Decoupled Structure

A Mode Matched Triaxial Vibratory Wheel Gyroscope with Fully Decoupled Structure

Coupling Mechanism Analysis and Fabrication of Triaxial Gyroscopes in Monolithic MIMU

Design, Analysis and Experimental Results of Micromachined Single-structure Triaxis Vibratory Gyroscope with Advanced Coupling Mechanism

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