“…In recent years, micropumps play an increasingly important role in the field of biological (Elham et al, 2016), medical (Florian et al, 2015; Revathi and Padmanabhan, 2016), chemical (Zhou et al, 2016), electronics cooling (Kim et al, 2012), fuel delivery (Chao et al, 2011; Nisar et al, 2008), and so on. Among the many types of mechanical micropumps, piezoelectric micropump received more and more attention due to some advantages such as simple structure, easy manufacturing, high efficiency, no electromagnetic interference, and good reliability (Ma et al, 2011; Nguyen et al, 2002; Peter, 2005).…”