Design and Analysis of MEMS Biaxial Coupled Resonance Accelerometer

Zhang, Huimin; Zhang, Yating; Zhang, Wei

doi:10.1109/nems51815.2021.9451525

Cited by 3 publications

(1 citation statement)

References 8 publications

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“…However, manufacturing process errors will lead to different force coefficients and nonlinearity of sensitivity. When the micromechanical lever amplifies the axial force, it also increases the coupling sensitivity of the cross axis [4,5]. At the same time, the levers need long-term repetitive work, and there is a risk of fatigue fracture.Once the resonant frequency is determined, there is deviation between the resonant frequency and the expected design value due to manufacturing errors.…”

Section: Introductionmentioning

confidence: 99%

Closed-Loop Control and Output Stability Analysis of a Micromechanical Resonant Accelerometer

Liu

2022

Micromachines

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In this study, a dynamic equation for a micromechanical resonant accelerometer based on electrostatic stiffness is analyzed, and the parameters influencing sensitivity are obtained. The sensitivity can be increased by increasing the detection proof mass and the area facing the detection capacitor plate and by decreasing the stiffness of the fold beams and the initial distance between the plate capacitors. Sensitivity is also related to the detection voltage: the larger the detection voltage, the greater the sensitivity. The dynamic equation of the closed-loop self-excited drive of the accelerometer is established, and the steady-state equilibrium point of the vibration amplitude and the stability condition are obtained using the average period method. Under the constraint conditions of the PI controller, when the loading acceleration changes, the vibration amplitude is related to the reference voltage and the pre-conversion coefficient of the interface circuit and has nothing to do with the quality factor. When the loading voltage is 2 V, the sensitivity is 321 Hz/g. Three Allan variance analysis methods are used to obtain the frequency deviation of 0.04 Hz and the amplitude deviation of 0.06 mVwithin 30 min at room temperature. When the temperature error in the incubator is ±0.01 °C, the frequency deviation decreases to 0.02Hz, and the resolution is 56ug. The fully overlapping Allan variance analysis method (FOAV) requires a large amount of data and takes a long time to implement but has the most accurate stabilityof the three methods.

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Section: Introductionmentioning

confidence: 99%

Closed-Loop Control and Output Stability Analysis of a Micromechanical Resonant Accelerometer

Liu

2022

Micromachines

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A Review on MEMS Silicon Resonant Accelerometers

Zhang,

Hao

et al. 2024

J. Microelectromech. Syst.

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Structural Design and Optimization of a Resonant Micro-Accelerometer Based on Electrostatic Stiffness by an Improved Differential Evolution Algorithm

Huang

Qin

et al. 2021

Micromachines

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This study designed an in-plane resonant micro-accelerometer based on electrostatic stiffness. The accelerometer adopts a one-piece proof mass structure; two double-folded beam resonators are symmetrically distributed inside the proof mass, and only one displacement is introduced under the action of acceleration, which reduces the influence of processing errors on the performance of the accelerometer. The two resonators form a differential structure that can diminish the impact of common-mode errors. This accelerometer realizes the separation of the introduction of electrostatic stiffness and the detection of resonant frequency, which is conducive to the decoupling of accelerometer signals. An improved differential evolution algorithm was developed to optimize the scale factor of the accelerometer. Through the final elimination principle, excellent individuals are preserved, and the most suitable parameters are allocated to the surviving individuals to stimulate the offspring to find the globally optimal ability. The algorithm not only maintains the global optimality but also reduces the computational complexity of the algorithm and deterministically realizes the optimization of the accelerometer scale factor. The electrostatic stiffness resonant micro-accelerometer was fabricated by deep dry silicon-on-glass (DDSOG) technology. The unloaded resonant frequency of the accelerometer resonant beam was between 24 and 26 kHz, and the scale factor of the packaged accelerometer was between 54 and 59 Hz/g. The average error between the optimization result and the actual scale factor was 7.03%. The experimental results verified the rationality of the structural design.

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Design and Analysis of MEMS Biaxial Coupled Resonance Accelerometer

Cited by 3 publications

References 8 publications

Closed-Loop Control and Output Stability Analysis of a Micromechanical Resonant Accelerometer

Closed-Loop Control and Output Stability Analysis of a Micromechanical Resonant Accelerometer

A Review on MEMS Silicon Resonant Accelerometers

Structural Design and Optimization of a Resonant Micro-Accelerometer Based on Electrostatic Stiffness by an Improved Differential Evolution Algorithm

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