Design and analysis of photonic MEMS based micro ring resonators for pressure sensing application

Patil, Prajwal P; Kamath, Sushma P; Upadhyaya, Anup M.; Sharan, Preeta

doi:10.1088/1361-6439/ac2bb1

Cited by 6 publications

(2 citation statements)

References 17 publications

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“…The miniaturization of optical sensors has also brought about photonic integrated circuits, more specifically, micro-ring resonators. This technology has showcased a very high sensitivity to pressure and temperature: 2.77 nm/GPa in a pressure range of 0-10 GPa [9] and 49.77 nm/MPa in a range of 3-9 MPa [10], and 2.9 nm/ • C in a range of 0-50 • C [11]. Their low power requirements and fast response to environmental changes places them as highly competitive sensing technologies.…”

Section: Introductionmentioning

confidence: 99%

A Silica Capillary-Based Sensor with Access Channels for the Simultaneous Measurement of Pressure and Temperature

Santos,

Bierlich,

Kobelke

et al. 2023

Photonics

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A hybrid fiber sensor for the simultaneous measurement of pressure and temperature is proposed. The sensor is constituted of a section of silica capillary tube (SCT) whereat access channels are created with two different methods: instilling a bubble on the fiber by employing successive arc discharges on the SCT whilst under pressure and splicing the SCT with another section of SCT with a smaller inner diameter. The reflection-based sensor enhances Fabry–Perot interference (FPI) and antiresonant (AR) guidance, simultaneously, in a single sensing element of a few millimeters. A comparison study between the access channel methods reveals higher spectral visibility for the bubble method and similar pressure and temperature resolutions. For a 2.58 mm long sensor with a bubble, the sensitivity to pressure is 4.09 ± 0.01 nm/MPa and −3.7 ± 0.1 nm/MPa for the FPI and AR, respectively, while its sensitivity to temperature is −0.20 ± 0.02 pm/°C and 24.0 ± 0.5 pm/°C, respectively, for the FPI and AR, which are within the numerically calculated sensitivities. The sensor is robust and has a convenient reflective probe with easy and low-cost fabrication, granting high competitiveness in actual applications.

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Section: Introductionmentioning

confidence: 99%

A Silica Capillary-Based Sensor with Access Channels for the Simultaneous Measurement of Pressure and Temperature

Santos,

Bierlich,

Kobelke

et al. 2023

Photonics

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show abstract

“…Optical micro-resonators are highly sensitive to the external environment and stimuli. They can detect small variations of the pressure, temperature, acceleration, index of refraction, etc., by measuring the change of the optical resonance. The change can be the shift of the resonant wavelengths and the splitting or broadening of the resonant peaks.…”

Section: Iintroductionmentioning

confidence: 99%

Mid-Infrared Serial Microring Resonator Array for Real-Time Detection of Vapor-Phase Volatile Organic Compounds

Zhou

Husseini

et al. 2022

Anal. Chem.

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Chip-scale infrared spectrometers consisting of a microring resonator array (MRA) were developed for volatile organic compound (VOC) detection. The MRA is serially positioned to serve as a wavelength sorting element that enables wavelength demultiplexing. Unlike conventional devices operated by a single microring, our MRA can perform multiwavelength mid-infrared (mid-IR) sensing by routing the resonant wavelength light from a broadband mid-IR source into different sensing channels. Miniaturized spectrometer devices were fabricated on mid-IR transparent silicon-rich silicon nitride (SiN x ) thin films through complementary metal–oxide-semiconductor (CMOS) processes, thus enabling wafer-level manufacturing and packaging. The spectral distribution of the resonance lines and the optimization of the microring structures were designed using finite-difference time-domain (FDTD) modeling and then verified by laser spectrum scanning. Using small microring structures, the spectrum showed a large free spectral range (FSR) of 100 nm and held four spectral channels without crosstalk. Unlike near-infrared microrings using refractive index sensing, our MRA can detect hexane and ethanol vapor pulses by monitoring the intensity variation at their characteristic mid-IR absorption bands, thus providing high specificity. Applying multiwavelength detection, the sensor module can discriminate among various VOC vapors. Hence, our mid-IR MRA could be an essential component to achieve a compact spectroscopic sensing module that has the potential for applications such as remote environmental monitoring and portable health care devices.

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Comparative analysis and design of high-performance photonic crystal add–drop filter for optical switching

Asthana

Kumar

Sharan³

2022

J Opt

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Design and analysis of photonic MEMS based micro ring resonators for pressure sensing application

Cited by 6 publications

References 17 publications

A Silica Capillary-Based Sensor with Access Channels for the Simultaneous Measurement of Pressure and Temperature

A Silica Capillary-Based Sensor with Access Channels for the Simultaneous Measurement of Pressure and Temperature

Mid-Infrared Serial Microring Resonator Array for Real-Time Detection of Vapor-Phase Volatile Organic Compounds

Comparative analysis and design of high-performance photonic crystal add–drop filter for optical switching

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