Design and Analysis of Wideband Ladder-Type Film Bulk Acoustic Wave Resonator Filters in Ku-Band

Abstract

This paper presents the design of ladder-type filters based on film bulk acoustic wave resonator (FBAR) in Ku-band. The proposed FBAR filter has an insertion loss of −3 dB, out-of-band rejection of −12 dB and 3 dB bandwidth of 1.0 GHz from 15 GHz to 16 GHz. Based on the characteristics of the FBAR filter, the expected characteristics of FBAR resonators are determined by using the 1D numerical analysis. This design proves that it is possible to design a wide-bandwidth FBAR filter in Ku-band.

Estimation of Material Damping Coefficients of AlN for Film Bulk Acoustic Wave Resonator

“…As mentioned previously, 1-D modelling does not take into account the influence of electrodes and other losses such as thermoelastic damping (TED) and material damping. Therefore, the Q factor obtained in the analysis described in previous work was too high [22]. For the purpose of analysis, an FBAR with an AlN thickness of 185 nm and Ru thickness of 25 nm is selected and the effect of different types of losses on the FBAR is investigated.…”