Design and characterization of a resonant triaxial microprobe

Abstract

A new trend for tactile microprobes leads to oscillating microprobes in order to overcome the drawbacks resulting from high Hertzian stress and disturbing surface forces. Thin water films on the measurement surface result in the so-called sticking effect which causes measurement faults such as snap-back and false triggering. This leads to measurement errors and low measurement speeds. We present an innovative oscillating triaxial microprobe which safely avoids sticking in all Cartesian measurement directions. The system design as well as the characterization of the microprobe are presented in this work. The low number of coupling elements, the batch-capable design and the low contact forces are the key features of the microprobe.

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

“…The low measurement force and 3D isotropy of sensing could be achieved by designing an intelligent hinge structure [59,96]. Furthermore, using MEMS, a probe system that can be oscillated in three axes and incorporates a three-axis electrostatic actuator has been proposed [100]. Thus, the hinge-typed microprobe system can perform various functions by combining MEMS and semiconductor technologies and developing a hinge mechanism.…”

“…Figure 11 shows the development of a microprobe that vibrates the probe tip using a MEMS electrostatic actuator [118]. It was possible to vibrate the probe tip in three directions [100], because it was composed of compact actuators, thus allowing the microprobe system to be smaller than a few centimeters [100]. A ruby ball with a diameter of 200 μm was used as the probe stylus and glued to the end of a shaft.…”

Resonant probing system comprising a high accurate uniaxial nanoprobe and a new evaluation unit

“…The mass of the nanoprobe is guided by four serpentine springs to achieve high stiffness in y-and z-direction and low stiffness in x-direction, [10]. Two mechanical stops were designed to avoid pull-in and a damage of the electrode fingers.…”

Integration of a piezoresistive microprobe into a commercial gear measuring instrument

“…For nondestructive or pseudo noncontact probing, vibrating microprobes have been developed [3,4]. More recently, a capacitive vibrating microprobe was developed at TU Ilmenau [5] and the piezoelectric vibrating microprobe by Mitutoyo [1,6] and by the UK's National Physical Laboratory (NPL) [7]. The glass fiber microprobe made by Werth (Werth GmbH, Germany), based on a development of the Physikalisch-Technische Bundesanstalt (PTB), combines tactile probing with the optical evaluation of the probing ball deflections.…”