Design and characterization of a low-voltage piezoelectrically actuated polymer membrane

Feth, H.; Esch, Mandy B.; Mueller, Claas; Thoma, Florian; Biancuzzi, Giovanni; Lemke, Thomas; Goldschmidtboeing, Frank; Woias, Peter

doi:10.1109/transducers.2011.5969608

Cited by 4 publications

(3 citation statements)

References 9 publications

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“…The detected displacement and the hysteretic cycle were found in agreement with the results provided by numerical simulations [14,26,27]. Similar hysteretic behaviors, not strictly related to the device shape and structural materials, were reported by other authors in [9,10,25].…”

Section: Quasi-static Lens Displacement and Optical Thickness Varisupporting

confidence: 90%

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Characterization of Tunable Micro-Lenses with a Versatile Optical Measuring System

Merlo

Crisà

Giusti

et al. 2018

Sensors

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In this work, we present the results of the opto–electro–mechanical characterization of tunable micro-lenses, Tlens®, performed with a single-spot optical measuring system. Tested devices are composed of a transparent soft polymer layer that is deposited on a supporting glass substrate and is covered by a glass membrane with a thin-film piezoelectric actuator on top. Near-infrared optical low-coherence reflectometry is exploited for both static and low-frequency dynamic analyses in the time domain. Optical thickness of the layers and of the overall structure, actuation efficiency, and hysteretic behavior of the piezo-actuator as a function of driving voltage are obtained by processing the back-reflected signal in different ways. The use of optical sources with relatively short coherence lengths allows performing interferometric measurements without spurious resonance effects due to multiple parallel interfaces, furthermore, selecting the plane/layer to be monitored. We finally report results of direct measurements of Tlens® optical power as a function of driving voltage, performed by redirecting a He-Ne laser beam on the lens and monitoring the focused spot at various distances with a digital camera.

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Section: Quasi-static Lens Displacement and Optical Thickness Varisupporting

confidence: 90%

“…Compared to other current solutions, their main advantages consist in lower power consumption and faster response. Piezoelectrically actuated membranes are also the basic building blocks for other MEMS devices, such as micropumps [9,10].…”

Section: Introductionmentioning

confidence: 99%

Characterization of Tunable Micro-Lenses with a Versatile Optical Measuring System

Merlo

Crisà

Giusti

et al. 2018

Sensors

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“…The red trace refers to the interferometric signal collected for increasing voltage (thus, in the half-period of the triangle wave exhibiting positive slope, d V /d t > 0) whereas the black dashed trace is for decreasing voltage (thus, in the half-period of the triangle wave exhibiting negative slope, d V /d t < 0). Hysteresis in the position assumed by the micro-membrane for increasing and decreasing voltages, as expected for piezo-electric actuation [25,26,27], is highlighted by this plot as the fringes for d V /d t > 0 are not superposed to the fringes detected for d V /d t < 0. The displacement was finally reconstructed as a function of the instantaneous value of the piezo-actuator driving voltage by fringe counting with a λ/8 = 165 nm resolution, that is by detecting the voltage corresponding to all the maxima, minima and zero crossings of the interferometric signal.…”

Section: Resultsmentioning

confidence: 91%

Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry

Merlo

Crisà

et al. 2017

Sensors

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In this work, we have applied optical low-coherence reflectometry (OLCR), implemented with infra-red light propagating in fiberoptic paths, to perform static and dynamic analyses on piezo-actuated glass micro-membranes. The actuator was fabricated by means of thin-film piezoelectric MEMS technology and was employed for modifying the micro-membrane curvature, in view of its application in micro-optic devices, such as variable focus micro-lenses. We are here showing that OLCR incorporating a near-infrared superluminescent light emitting diode as the read-out source is suitable for measuring various parameters such as the micro-membrane optical path-length, the membrane displacement as a function of the applied voltage (yielding the piezo-actuator hysteresis) as well as the resonance curve of the fundamental vibration mode. The use of an optical source with short coherence-time allows performing interferometric measurements without spurious resonance effects due to multiple parallel interfaces of highly planar slabs, furthermore selecting the plane/layer to be monitored. We demonstrate that the same compact and flexible setup can be successfully employed to perform spot optical measurements for static and dynamic characterization of piezo-MEMS in real time.

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Design, fabrication and characterization of a piezoelectrically actuated bidirectional polymer micropump

et al. 2013

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Design and characterization of a low-voltage piezoelectrically actuated polymer membrane

Cited by 4 publications

References 9 publications

Characterization of Tunable Micro-Lenses with a Versatile Optical Measuring System

Characterization of Tunable Micro-Lenses with a Versatile Optical Measuring System

Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry

Design, fabrication and characterization of a piezoelectrically actuated bidirectional polymer micropump

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