Design and control of a high-acceleration precision positioning system using a novel flexible decoupling mechanism

Wang, F; Zhao, Xingyu; Zhang, D; Wu, Yimin; Shirinzadeh, Bijan; Tian, Yanling

doi:10.1243/09544062jmes1793

Cited by 14 publications

(10 citation statements)

References 16 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Figure 10 shows the experimental set-up for dynamic characteristics investigation. The bond head was fixed on an XY positioning table [3], and the X -and Y -axes actuators were enabled. The excitation forces were generated by a hammer, and they were applied to the bond head in x-, y-, and zdirections.…”

Section: Methodsmentioning

confidence: 99%

Design and control of a directly-driven bond head for thermosonic bonding

Wang

Xing

Zhang

et al. 2010

Proceedings of the Institution of Mechanical Engineers, Part C:

Self Cite

View full text Add to dashboard Cite

This article presents a high-acceleration rotary bond head to improve the efficiency and precision of thermosonic bonding. The bond head is direct driven by a rotary voice coil actuator, and needle roller bearings are adopted as the rotary connection parts. Using the finite-element analysis and experiment tests, the dynamic characteristics of the bond head were investigated. The results indicate that the vibrations of the bond head have negative influences on the bonding process and the ultrasonic transducer system. They can reduce the efficiency of the ultrasonic energy transmission and even result in the bonder working abnormally. To avoid these vibration modes, high-frequency harmonic components of the driving signals were eliminated by adding a notch filter to the control system. Considering the remnant vibrations during high-frequency starts and stops, friction compensation and proportion integration differentiation (PID) feedback control with anti-windup correction were adopted. The controller was designed and co-simulated by using MATLAB and MSC.ADAMS software. The co-simulation and experiment results show that the bond head provides for good performances.

show abstract

Section: Methodsmentioning

confidence: 99%

Design and control of a directly-driven bond head for thermosonic bonding

Wang

Xing

Zhang

et al. 2010

Proceedings of the Institution of Mechanical Engineers, Part C:

Self Cite

View full text Add to dashboard Cite

show abstract

“…Motion decoupling is an important factor that would significantly influence the performance of multi-DOF positioning. In macro positioning stages, the motion decoupling can be realized through conventional kinematic pairs, which usually has a certain degree of freedom of movement [29,30], but things are different in micro/nano compliant stages. In order to eliminate the influence of friction and backlash, flexure hinges are adopted, and parallel kinematic configuration is commonly used because of its outstanding performance, but along with the problem of output motion coupling [16].…”

Section: Mechanical Designmentioning

confidence: 99%

A Novel Actuator-Internal Micro/Nano Positioning Stage With an Arch-Shape Bridge-Type Amplifier

Wang

Huo

Liang

et al. 2019

IEEE Trans. Ind. Electron.

102

View full text Add to dashboard Cite

“…The vision alignments were realized with the aid of a precision positioning table driven by linear voice coil motors which can move in two orthogonal directions (X and Y) [37]. To reduce the disturbances of external environment such as noise, vibration, the system for vision alignment was set up on a Newport RS-4000 vibration isolated table.…”

Section: B Vision Alignmentsmentioning

confidence: 99%