Design and Demonstration of a Bulk Micromachined Fabry–PÉrot $\mu$g-Resolution Accelerometer

Perez, Maximillian A.; Shkel, Andrei M.

doi:10.1109/jsen.2007.909085

Cited by 32 publications

(15 citation statements)

References 18 publications

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“…Intensity-based devices can be realised by MEMS processing techniques [6,7] but generally offer lower sensitivities than optical fibre and FPI designs. FPI accelerometers, on the other hand, have the potential for high sensitivity while also being compatible with micro-fabrication [8][9][10].…”

Section: Introductionmentioning

confidence: 99%

Optical accelerometer with mechanical amplification via a V-beam mechanism

Davies

George

Gower

et al. 2013

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)

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A method is reported for improving the performance of a Fabry-Pérot optical accelerometer, based on the use of a V-beam mechanism to amplify the proof mass displacement. Amplification allows the sensitivity to be increased without compromising bandwidth or requiring an increase in cavity finesse. An analytical expression relating the amplification factor to the V-beam length, width and angle was derived and used to produce a series of differently angled devices. A 1.9° device was capable of detecting accelerations from 0.01 to 10 g rms. The 1.33° accelerometer produced an amplification of 18.6 ± 6.4.

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Section: Introductionmentioning

confidence: 99%

Optical accelerometer with mechanical amplification via a V-beam mechanism

Davies

George

Gower

et al. 2013

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)

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“…The surfaces of the inner faces of the gap remain polished silicon. Fabrication of the device and a detailed description of the optical and mechanical operation have been presented previously [21,22].…”

Section: Characterizationmentioning

confidence: 99%

The effect of squeeze film constriction on bandwidth improvement in interferometric accelerometers

Perez¹,

Shkel²

2008

J. Micromech. Microeng.

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This paper studies the effects of a constricted squeeze film on the performance of an optical microelectromechanical system accelerometer. Squeeze films are shown to extend the sensor frequency range (bandwidth) in accelerometers without decreasing the mechanical sensitivity by retarding the resonate response. By restricting the venting of a squeeze film, this preferential behavior is observed at lower frequencies than is expected for ideally vented accelerometers. Due to this effect, constricted squeeze films may be used to improve the bandwidth performance of devices of lower natural frequencies and higher inertial sensitivities. A model, extended from the existing squeeze film theory, is developed for the squeeze film formed between circular plates with generalized mixed boundary pressure conditions to describe the boundary flow resistance. These effects are experimentally observed in a parallel plate Fabry-Pérot interferometric accelerometer through frequency response characterization at mechanical resonance under pressure variation. The analytical results for the constricted squeeze film are used to predict the performance gains due to the frequency-dependent squeeze film parameters. These results are experimentally confirmed by demonstrating improved bandwidth performance due to the constricted squeeze film.

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“…Fabry-Pérot interferometry has been previously demonstrated in a number of MEMS accelerometers. This work can be broken into two groups: fiber-optic cavities [1][2][3][4][5] and vertically oriented cavities [6][7][8]. The first uses an optical fiber to deliver and collect light while also serving as one mirror of the cavity.…”

Section: Introductionmentioning

confidence: 99%

An optomechanical accelerometer with a high-finesse hemispherical optical cavity

Cervantes¹,

Balijepalli²,

Lawall³

et al. 2016

2016 IEEE International Symposium on Inertial Sensors and Systems

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A new design for an optomechanical accelerometer is presented. The design includes a hemispherical optical cavity that can achieve high finesse and a proof mass that is wellconstrained by silicon nitride beams. Based on previous work and analysis, the resolution of the accelerometer will be below 1 µg/rt-Hz. Novel MEMS fabrication processes have been developed for the accelerometer that provide optimized optical and mechanical elements. The optical cavity in the accelerometer has been characterized and a tunable laser has been locked to the cavity, thereby demonstrating the possibility for closed-loop operation of the accelerometer.

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Design and Demonstration of a Bulk Micromachined Fabry–PÉrot $\mu$g-Resolution Accelerometer

Cited by 32 publications

References 18 publications

Optical accelerometer with mechanical amplification via a V-beam mechanism

Optical accelerometer with mechanical amplification via a V-beam mechanism

The effect of squeeze film constriction on bandwidth improvement in interferometric accelerometers

An optomechanical accelerometer with a high-finesse hemispherical optical cavity

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