Design and evaluation of a quantum-well-based resistive far-infrared bolometer

Ericsson, Per; Höglund, Linda; Samel, Björn; Savage, Susan; Wissmar, Stanley; Öberg, Olof; Källhammer, Jan-Erik; Eriksson, Dick

doi:10.1117/12.865036

Cited by 9 publications

(16 citation statements)

References 15 publications

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“…These are the bottom reflector, the Si/SiGe multi-layer thermistor, a silicon nitride (SiNx) layer functioning as the leg support material and a MoSi resistive top layer. To verify the model, we have manufactured test structures with this layer combination and determined the infrared absorption by evaluating the structures using a Nicolet Avatar FT-IR setup covering wavelengths between approximately 2.5 µm and 25 µm [6].…”

Section: Quantum Well Sensor Materialsmentioning

confidence: 99%

“…For a given pixel pitch, there are several design issues relating to both the sensor material and the sensor-to-ROIC integration process that must be considered to reach overall good performance. We have previously reported on some aspects of sensor material design and optimization [6,7] and on the integration process for 25x25 µm pitch pixels [8][9][10]. In this paper we will address further design aspects of the infrared absorbing internal quarter wave cavity and present the latest results on scaling of the heterogeneous integration process down to 17x17 µm pitch bolometer arrays.…”

Section: Introductionmentioning

confidence: 99%

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Toward 17Âµm pitch heterogeneously integrated Si/SiGe quantum well bolometer focal plane arrays

Ericsson¹,

Fischer

Forsberg

et al. 2011

SPIE Proceedings

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Most of today's commercial solutions for un-cooled IR imaging sensors are based on resistive bolometers using either Vanadium oxide (VOx) or amorphous Silicon (a-Si) as the thermistor material. Despite the long history for both concepts, market penetration outside high-end applications is still limited. By allowing actors in adjacent fields, such as those from the MEMS industry, to enter the market, this situation could change. This requires, however, that technologies fitting their tools and processes are developed. Heterogeneous integration of Si/SiGe quantum well bolometers on standard CMOS read out circuits is one approach that could easily be adopted by the MEMS industry. Due to its mono crystalline nature, the Si/SiGe thermistor material has excellent noise properties that result in a state-ofthe-art signal-to-noise ratio. The material is also stable at temperatures well above 450°C which offers great flexibility for both sensor integration and novel vacuum packaging concepts. We have previously reported on heterogeneous integration of Si/SiGe quantum well bolometers with pitches of 40µm x 40µm and 25µm x 25µm. The technology scales well to smaller pixel pitches and in this paper, we will report on our work on developing heterogeneous integration for Si/SiGe QW bolometers with a pixel pitch of 17µm x 17µm.

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Section: Quantum Well Sensor Materialsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Toward 17Âµm pitch heterogeneously integrated Si/SiGe quantum well bolometer focal plane arrays

Ericsson¹,

Fischer

Forsberg

et al. 2011

SPIE Proceedings

Self Cite

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“…More discussions about the SiGe/Si thermistor material are presented by Ericsson et al (Per Ericsson et al, 2010) It is generally observed that the flicker noise is volume dependent (Motchenbacher, 1973). This study presents the effect of pixel area on the Flicker noise (the vertical thickness is constant).…”

Section: Thermal Excitationmentioning

confidence: 99%

“…In this case, a reflective area is (a mirror-like) deposited on the bottom side of the bolometer membrane (Per Ericsson et al, 2010).…”

Section: Thermal Detectorsmentioning

confidence: 99%

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Group IV Materials for Low Cost and High Performance Bolometers

Radamson¹,

Kolahdouz²

2012

Bolometers

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Recent Developments in Wearable NEMS/MEMS-Based Smart Infrared Sensors for Healthcare Applications

Padha,

Yadav,

Dutta

et al. 2023

ACS Appl. Electron. Mater.

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Incorporating nano-and microelectromechanical systems (NEMS/MEMS)-based sensors in clothing and developing more compact and flexible devices have gained popularity recently. NEMS/MEMS-based bolometers/sensors have gained significance due to their high sensitivity and accuracy in measuring physical parameters such as temperature, humidity, pressure, and infrared (IR) and ultraviolet (UV) radiations. When worn on the body, bolometers can be employed in various applications such as environmental monitoring or health tracking. This review highlights the progress of smart wearable bolometers as NEMS/ MEMS-based sensors in the healthcare industry. Instead of visiting multiple healthcare facilities or devices, now people can assess their health status by measuring body temperature, sensing motion, respiratory functioning, blood pressure, oxygen levels of the blood, and heart functioning by integrating these devices into fabriclike garments, socks, shoe insoles, wrist watches, and other pieces of clothing. The article concludes by describing their varied challenges and possible solutions and prospects.

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Design and evaluation of a quantum-well-based resistive far-infrared bolometer

Cited by 9 publications

References 15 publications

Toward 17Âµm pitch heterogeneously integrated Si/SiGe quantum well bolometer focal plane arrays

Toward 17Âµm pitch heterogeneously integrated Si/SiGe quantum well bolometer focal plane arrays

Group IV Materials for Low Cost and High Performance Bolometers

Recent Developments in Wearable NEMS/MEMS-Based Smart Infrared Sensors for Healthcare Applications

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