Design and evaluation of in-plane silicon microneedles fabricated with post-CMOS compatible processes

Mamun, Abdulla Al; Sueoka, Brandon; Allison, Noah Riley; Huang, Yue; Zhao, Feng

doi:10.1016/j.sna.2022.113407

Cited by 12 publications

(8 citation statements)

References 37 publications

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“…Distinct tip designs of microneedles have been tested [ 11 , 17 , 42 ] by piercing the needle into materials such as chicken breast flesh or agarose gel which mimics human skin [ 72 ] to determine the penetration strength for insertion. In our recent study [ 42 ], it was observed that the insertion force of one-needle devices increased with the tapered angle of needle tips, while five-needle devices required a large insertion force due to the large pricking area. Furthermore, the insertion force, free bending force, and the maximum buckling force were all reduced, and the maximum bending stress was improved after microneedle tip sharpening.…”

Section: Discussionmentioning

confidence: 99%

“…This fabrication process typically includes deposition of etching mask material, lithography to pattern microneedle structures, and followed by anisotropic etching by deep reactive ion etching (DRIE) or inductively coupled plasma (ICP) etching. Isotropic wet etching can be applied to sharpen the needle tip [ 3 , 42 ] with a proper etchant such as a mixture of hydrofluoric acid (HF) and nitric acid (H 3 NO 4 ). Finally, the suitable metal is coated for improved biocompatibility and the strength of the microneedle.…”

Section: Fabricationmentioning

confidence: 99%

“…In order to improve the insertion of the in-plane Si microneedles, the chemical etching process is usually applied to efficiently taper the base and sharpen the needle [ 3 , 42 ]. In these studies, the needle tips were sharpened by a wet chemical etching process in a mixed solution of HF and HNO3 (1:20 by volume).…”

Section: Fabricationmentioning

confidence: 99%

“… Free bending force and buckling force acting on the microneedle. Reprinted with permission from Reference [ 42 ]. …”

Section: Figurementioning

confidence: 99%

“…( d ) Force-displacement measurement results for microneedle before and after tip sharpening. Reprinted with permission from Reference [ 42 ].…”

Section: Figurementioning

confidence: 99%

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In-Plane Si Microneedles: Fabrication, Characterization, Modeling and Applications

Mamun

Zhao

2022

Micromachines

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Microneedles are getting more and more attention in research and commercialization since their advancement in the 1990s due to the advantages over traditional hypodermic needles such as minimum invasiveness, low material and fabrication cost, and precise needle geometry control, etc. The design and fabrication of microneedles depend on various factors such as the type of materials used, fabrication planes and techniques, needle structures, etc. In the past years, in-plane and out-of-plane microneedle technologies made by silicon (Si), polymer, metal, and other materials have been developed for numerous biomedical applications including drug delivery, sample collections, medical diagnostics, and bio-sensing. Among these microneedle technologies, in-plane Si microneedles excel by the inherent properties of Si such as mechanical strength, wear resistance, biocompatibility, and structural advantages of in-plane configuration such as a wide range of length, readiness of integration with other supporting components, and complementary metal-oxide-semiconductor (CMOS) compatible fabrication. This article aims to provide a review of in-plane Si microneedles with a focus on fabrication techniques, theoretical and numerical analysis, experimental characterization of structural and fluidic behaviors, major applications, potential challenges, and future prospects.

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Section: Discussionmentioning

confidence: 99%

Section: Fabricationmentioning

confidence: 99%

Section: Fabricationmentioning

confidence: 99%

“… Free bending force and buckling force acting on the microneedle. Reprinted with permission from Reference [ 42 ]. …”

Section: Figurementioning

confidence: 99%

“…( d ) Force-displacement measurement results for microneedle before and after tip sharpening. Reprinted with permission from Reference [ 42 ].…”

Section: Figurementioning

confidence: 99%

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In-Plane Si Microneedles: Fabrication, Characterization, Modeling and Applications

Mamun

Zhao

2022

Micromachines

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Microneedle Sensors for Multiplex Applications: Toward Advanced Biomedical and Environmental Analysis

Omar

Zheng

Wang

et al. 2022

Advanced Sensor Research

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Microneedles(MNs) are versatile tiny devices that have attracted interest in various fields including medicine, environment, food and agriculture due to their unique properties, such as low-cost, simplicity, pain-free application and minimally invasive penetration, therapeutic efficacy, biosensing ability, and biocompatibility. These properties along with the MNs distinctive geometry including dimension control, material type and fabrication techniques have enabled the optimization of MNs based on each desired application. This review summarizes the latest advances in MN-based sensors in a variety of fields and provides a bird's eye view over the wide range of applications, starting from material and fabrication techniques to advanced sensor types in the biomedical and environmental fields for both sensing and treatment, and showing the profound advantages of this emerging tool in clinical and sustainable fields.

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Silicon microneedles for drug delivery

Mohd Noor,

Zainal Abidin,

Ooi

et al. 2024

Design and Applications of Microneedles in Drug Delivery and Therapeutics

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Design and evaluation of in-plane silicon microneedles fabricated with post-CMOS compatible processes

Cited by 12 publications

References 37 publications

In-Plane Si Microneedles: Fabrication, Characterization, Modeling and Applications

In-Plane Si Microneedles: Fabrication, Characterization, Modeling and Applications

Microneedle Sensors for Multiplex Applications: Toward Advanced Biomedical and Environmental Analysis

Silicon microneedles for drug delivery

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