2011
DOI: 10.1007/s00542-011-1404-x
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Design and evaluation process of a robust pressure sensor for measurements in boundary layers of liquid fluids

Abstract: In this work, the latest results of the design, fabrication and characterization of a new MEMS piezoresistive pressure sensor are presented. Significant changes in the layout as well as in the micro-fabrication process have been made, e.g. anodic bonding of a glass cover on the backside. The sensor has been developed in order to meet the special requirements of measurements in fluid mechanics, particularly with regard to the non-intrusive nature of the sensor. The sensor development, starting with the simulati… Show more

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Cited by 9 publications
(4 citation statements)
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“…However, the intrusive and fragile nature of most of the sensors not only changes the streaming flow but also susceptible to damage due to exposure to the incoming flow. To overcome this issue, Beutel et al (2012) introduced fiber material embedded piezoresistive pressure sensor for ensuring extremely flush mounting in the wall for the first time. The novel approach, in this case, was the integration of sensor and associated subsystems directly into the wall unlike other MEMS sensors reported earlier in literature.…”
Section: Aerospace Applicationsmentioning
confidence: 99%
“…However, the intrusive and fragile nature of most of the sensors not only changes the streaming flow but also susceptible to damage due to exposure to the incoming flow. To overcome this issue, Beutel et al (2012) introduced fiber material embedded piezoresistive pressure sensor for ensuring extremely flush mounting in the wall for the first time. The novel approach, in this case, was the integration of sensor and associated subsystems directly into the wall unlike other MEMS sensors reported earlier in literature.…”
Section: Aerospace Applicationsmentioning
confidence: 99%
“…Each sensor system is statically calibrated after embedding in a temperature-pressure reference chamber as described earlier [25]. Prior to the calibration a fast pre-calibration is performed for setting the PGA309 in the desired range (for a fixed temperature).…”
Section: Embedded Pressure Sensormentioning
confidence: 99%
“…The resistors are connected as a Wheatstone bridge in order to reach high sensitivity when decreasing and increasing resistances placed at opposing locations are used. Further information on the sensor can be found in [6].…”
Section: B Sensor Designmentioning
confidence: 99%