Design and experiment of an electromagnetic levitation system for a micro mirror

Xiao, Qijun; Wang, Yuan; Dricot, Samuel; Michael, Kraft

doi:10.1007/s00542-019-04452-w

Cited by 6 publications

(3 citation statements)

References 11 publications

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“…In particular, ELMA were successfully used as linear transporters [1] and in micro-inertial sensors [2,3]. MLAM can be further split into inductive (ILMA), diamagnetic (DLMA), superconducting micro-actuators and hybrid levitation micro-actuators (HLMA) [4], which have found applications in microbearings [5][6][7], micromirrors [8,9], micro-gyroscopes [10,11], micro-accelerometers [12], bistable switches [13], nanoforce sensors [14], microtransporters [15], microaccelerators [16], micromotors [17][18][19] and resonators [20].…”

Section: Introductionmentioning

confidence: 99%

On the Static Pull-In of Tilting Actuation in Electromagnetically Levitating Hybrid Micro-Actuator: Theory and Experiment

Poletkin

2021

Actuators

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This work presents the results of the experimental and theoretical study of the static pull-in of tilting actuation executed by a hybrid levitation micro-actuator (HLMA) based on the combination of inductive levitation and electrostatic actuation. A semi-analytical model to study such a pull-in phenomenon is developed, for the first time, as a result of using the qualitative technique based on the Lagrangian approach to analyze inductive contactless suspensions and a recent progress in the calculation of mutual inductance and force between two circular filaments. The obtained non-linear model, accounting for two degrees of freedom of the actuator, allows us to predict accurately the static pull-in displacement and voltage. The results of modeling were verified experimentally and agree well with measurements.

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Section: Introductionmentioning

confidence: 99%

On the Static Pull-In of Tilting Actuation in Electromagnetically Levitating Hybrid Micro-Actuator: Theory and Experiment

Poletkin

2021

Actuators

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“…In particular, ELMA were successfully used as linear transporters [4] and in micro-inertial sensors [5,6]. MLAM can be further split into inductive (ILMA), diamagnetic (DLMA), superconducting micro-actuators and hybrid levitation micro-actuators (HLMA) [7], which have found applications in micro-bearings [8][9][10], micro-mirrors [11,12], micro-gyroscopes [13,14], micro-accelerometers [15], bistable switches [16], nano-force sensors [17], micro-transporters [18], micro-accelerators [19], micro-motors [20][21][22] and resonators [23].…”

Section: Introductionmentioning

confidence: 99%

On the Static Pull-in of Tilting Actuation in Hybrid Levitation Micro-actuator: Theory and Experiment

Poletkin¹

2021

Preprint

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This work presents the results of the experimental and theoretical study of the static pull-in of tilting actuation executed by a hybrid levitation micro-actuator (HLMA) based on the combination of inductive levitation and electrostatic actuation. A semi-analytical model to study such the pull-in phenomenon is developed, for the first time, as a result of using the qualitative technique based on the Lagrangian approach to analyze inductive contactless suspensions presented in work and a recent progress in the calculation of mutual inductance and force between two circular filaments. The obtained non-linear model, accounting for two degrees of freedom of the actuator, allows us to predict accurately the static pull-in displacement and voltage. The results of modelling were verified experimentally and agree well with measurements.

show abstract

“…In particular, ELMA were successfully used as linear transporters [1] and in micro-inertial sensors [2,3]. MLAM can be further split into inductive (ILMA), diamagnetic (DLMA), superconducting micro-actuators and hybrid levitation micro-actuators (HLMA) [4], which have found applications in micro-bearings [5][6][7], micro-mirrors [8,9], micro-gyroscopes [10,11], micro-accelerometers [12], bistable switches [13], nano-force sensors [14], micro-transporters [15], micro-accelerators [16], micro-motors [17][18][19] and resonators [20].…”

Section: Introductionmentioning

confidence: 99%

Development of Control Circuit for Inductive Levitation Micro-Actuators

Vlnieska

Voigt

Wadhwa

et al. 2020

The 1st International Electronic Conference on Actuator Technology: Materials, Devices and Applications

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A control circuit for inductive levitation micro-actuators was developed in this research, the circuit’s performance and its electrical parameters are discussed. The developed control circuit was fabricated on a four-layer printed circuit board (PCB) board with a size of 60 × 60 × 25 mm. It consisted of a generator based on high-speed Flip-Flop components and a current amplifier build on a H-bridge configuration. The circuit was able to generate an AC current with a squared waveform in a frequency range from 8 to 43 MHz and with a peak-to-peak amplitude of up to 420 mA. To demonstrate the efficiency of developed circuit and its compatibility with a micro-actuation system, an inductive levitation micro-actuator was fabricated by using 3D micro-coil technology. The device was composed of two solenoidal coil designs, a levitation and a stabilization coil, with outer diameters of 2 and 3.8 mm, respectively. A 25 μm diameter gold wire was used to fabricate the coils, with the levitation coil having 20 turns and the stabilization coil having 12 turns, similar to the micro-structure presented previously by our group. Using the developed control circuit, the micro-actuator was successfully excited and it demonstrated the actuation of aluminum disc-shaped micro-objects with diameters of 2.8 and 3.2 mm and, for the first time, an aluminum square-shaped object with a side length of 2.8 mm at a frequency of 10 MHz. To characterize the actuation, the levitation height and the current amplitude were measured. In particular, we demonstrated that the square-shaped micro-object could be lifted up to a height of 84 μm with a current of 160 mA. The characterization was supported by a simulation using a 3D model based on the quasi-finite element model (FEM) approach.

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Design and experiment of an electromagnetic levitation system for a micro mirror

Cited by 6 publications

References 11 publications

On the Static Pull-In of Tilting Actuation in Electromagnetically Levitating Hybrid Micro-Actuator: Theory and Experiment

On the Static Pull-In of Tilting Actuation in Electromagnetically Levitating Hybrid Micro-Actuator: Theory and Experiment

On the Static Pull-in of Tilting Actuation in Hybrid Levitation Micro-actuator: Theory and Experiment

Development of Control Circuit for Inductive Levitation Micro-Actuators

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