Design and Experimental Research of a Rotary Micro-Actuator Based on a Shearing Piezoelectric Stack

Huang, Hehe; Wang, Longfei; Wu, Ying

doi:10.3390/mi10020096

Cited by 13 publications

(6 citation statements)

References 33 publications

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“…Our motor has a higher rotational speed and better adaptability among them. The motor [18] 90 × 70 × 13.5 2.11 (221 321 µrad s −1 ) 4.94 Not mention Wen et al [13] Φ30 × 5 187.7 4.8 Not mention Song et al [19] 55 × 65 × 13.5 0.255 (26.74 mrad s −1 ) 245 Not mention Huang et al [20] 12 × 10 × 8 5.6 (5.86 × 10 5 µrad s −1 ) 0.18 Not mention proposed by Wen et al [13] has a low drive voltage of 5 V pp .…”

Section: Discussionmentioning

confidence: 99%

“…Song et al [19] designed a piezoelectric inchworm rotary actuator with high driving torque of 245 mN m. Huang et al [20] use a shearing piezoelectric stack to build a rotary microactuator, which has the motion resolution of 0.64 µrad. In summary, a series of experiments are carried out and the results prove our motor can achieve good working performance.…”

Section: Discussionmentioning

confidence: 99%

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A small piezoelectric stack motor designed for vacuum and micro-dust environment

Wan¹,

Peng²,

Tang³

et al. 2022

Smart Mater. Struct.

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With the development of moon exploration, higher requirements have been proposed for the adaptability of small motors under vacuum and micro-dust conditions. In this paper, a rotational motor based on piezoelectric stacks is proposed, which can be driven by a single-phase direct current with a simple drive circuit. The motor dimensions are 24 mm × 24 mm × 24 mm (length × width × height), and the mass is 11.4 g. In air environment, the maximum output rotational speed of the motor is 1372 rpm, and the maximum stall torque is 3.2 mN·m at 40 VDC and 5.93 kHz. An open-loop control system is established to drive the stepping motion of the motor, and the minimum stepping angle is measured as 0.122 mrad. An environmental experiment of the motor is conducted in a lunar simulator module, which can simulate a high vacuum (6.7 × 10-5 Pa) and micro-dust (average 75 μm) environment of the lunar surface. The result shows that the motor can work steadily in the vacuum and micro-dust environment with an average speed of 1723 rpm, which demonstrates its potential applications in the space environment.

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Section: Discussionmentioning

confidence: 99%

Section: Discussionmentioning

confidence: 99%

A small piezoelectric stack motor designed for vacuum and micro-dust environment

Wan¹,

Peng²,

Tang³

et al. 2022

Smart Mater. Struct.

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“…Elektrik akımı, elektrik direncine sahip kollardan geçerken sıcaklık gradyanı genişler. Mikro-aktüatöre enerji tasarrufu prensibi kavramı uygulanır [21]. Dirençli ısıtma kaynağı ile kararlı durum enerji denklemi olarak sunulabilir:…”

Section: şEkil 3 Mikro-aktüatörün Sonlu Elemanlar Modeliunclassified

MEMS Tabanlı Elektrotermal Mikro-Aktüatörün Tasarımı ve Sonlu Elemanlar Analizi

Ülkir¹,

Ertugrul²,

Akkuş³

2020

El-Cezeri Fen Ve Mühendislik Dergisi

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Bu makale, COMSOL yazılımı ile tasarlanan mikro elektromekanik sistem (MEMS) tabanlı elektrotermal mikro-aktüatörün sonlu elemanlar analizi çalışmasını sunmaktadır. Elektrotermal aktüatörler, elektrostatik aktüatörlere kıyasla daha büyük yer değiştirmeler sağlamaktadır. Termal aktüatörler iki tiptir. Bimorf termal aktüatör ve tek malzemeden yapılmış elektrotermal uyumlu (ETU) aktüatör. Bimorf aktüatörler, iki veya daha fazla farklı malzemeden yapılmış kompozit yapıdır. Bu çalışmada ETU tipi termal aktüatör kullanılmıştır. İki yönde hareket edebilen mikro-aktüatör, belirlenen kriterlere göre tasarlanmış ve analizler gerçekleştirilmiştir. Sonlu elemanlar analizi için mikro-aktüatöre iletken özelliği olan polycrystalline silicon malzeme ataması yapılmıştır. Bu analiz mikro-aktüatörün fabrikasyonu ve karakterizasyonu işlemleri öncesinde büyük öneme sahiptir. Analiz sürecinde gerilim uygulanarak mikro-aktüatörün hareket etmesi sağlanmıştır. Çalışma gerilimi, 1V'luk artışlarla 0V'dan mikro-aktüatörün yapısında kırılmalar ve bozulmalar gözlemlenene kadar artırılmıştır. Mikro-aktüatör 5V gerilime kadar dayanabilmiştir. Bu gerilim değerinden sonra mikro-aktüatörün yapısında kırılmalar ve bozulmalar meydana gelmiştir. Analizler sonucunda maksimum yer değiştirme 5V gerilim uygulandığında 4.18 µm olarak ölçülmüştür. Sonuç olarak, elektrotermal mikro-aktüatör tasarımı çift yönlü olduğundan maksimum yer değiştirme 8.36 µm olarak tespit edilmiştir.

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“…Nonresonant-type piezoelectric motors, which are commonly used as micro manipulators, deal with the accurate positioning tasks. There are four main nonresonant-type motors, comprising the direct drive type [32][33][34][35], the inertial type [13,16,36], the stick-slip type [37][38][39][40], and the inchworm type [41][42][43][44]. These motors commonly use flexure hinge mechanisms and multilayer lead zirconate titanate (PZT) ceramics [45] to produce the desired vibrations at the contact interface to drive the end effector.…”

Section: Introductionmentioning

confidence: 99%

A novel three-phase excitation piezoelectric motor for macro-micro actuation: integration design, systematic modeling, and experimental evaluation

Qiu

Jin

Wang

et al. 2023

Smart Mater. Struct.

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Macro-micro actuators require complex feedback control systems to obtain high positioning cooperativeness. However, the mechanical connections of macro-micro actuators are generally redundant in terms of their size, which is highly unfavorable for both miniaturization and integration. This paper presents an approach to address this problem based on a novel integration design for a three-phase excitation piezoelectric motor (TPM) that is capable of performing macro-micro actuation by switching its operating mode from resonant to nonresonant. The load capacity of the proposed TPM can reach 0.39 Nm with a maximum speed of 3.82 rad/s (36.5 rpm). This performance is achieved by using a unique triangular flexible stator that contains three piezoelectric stack actuators (PSAs) acting as vibrators and is excited by a three-phase electrical signal. A time-domain electromechanical coupling dynamic model is developed to determine the dynamic behavior of the proposed motor, and the modeling results are validated successfully by experimental results obtained from a fabricated prototype. The proposed motor is expected to be helpful for integration design of piezoelectric devices that require macro-micro actuation.

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Design and Experimental Research of a Rotary Micro-Actuator Based on a Shearing Piezoelectric Stack

Cited by 13 publications

References 33 publications

A small piezoelectric stack motor designed for vacuum and micro-dust environment

A small piezoelectric stack motor designed for vacuum and micro-dust environment

MEMS Tabanlı Elektrotermal Mikro-Aktüatörün Tasarımı ve Sonlu Elemanlar Analizi

A novel three-phase excitation piezoelectric motor for macro-micro actuation: integration design, systematic modeling, and experimental evaluation

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