Design and Fabrication Issues in Affinity Cantilevers for bioMEMS Applications

Kale, Nitin S.; Rao, V. Ramgopal

doi:10.1109/jmems.2006.886031

Cited by 21 publications

(14 citation statements)

References 8 publications

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“…Immobilisation layer is applied over the structural layer of biosensing cantilevers which are used to sense the chemical substances, antibodies, explosives etc. The immobilisation layer is a chemical which reacts with the required analyte e.g., Palladium coating absorbs hydrogen and expands [10,11], Myoglobin antibody is used to detect myoglobin [12].…”

Section: Materials and Manufacturing Aspecfsmentioning

confidence: 99%

Nano/Micro-Electro-Mechanical Systems for Sensor Applications: A Brief Review

Subrahmanyam

Rao

Ramamurthy

et al. 2010

IETE Journal of Education

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Section: Materials and Manufacturing Aspecfsmentioning

confidence: 99%

Nano/Micro-Electro-Mechanical Systems for Sensor Applications: A Brief Review

Subrahmanyam

Rao

Ramamurthy

et al. 2010

IETE Journal of Education

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“…2(b). The detailed methodology and material properties of SU-8 and polysilicon that were employed to carry out the simulation are already reported in [10] and, hence, are not repeated in this paper. The cantilevers were simulated using the Coventorware simulation tool to compute their stiffness.…”

Section: Simulation Studymentioning

confidence: 99%

“…3(f) and (l)]. The thickness of the top SU-8 layer was designed smaller than the bottom SU-8 layer to keep the axis of the piezoresistive layer away from the neutral axis of the cantilever stack [10].…”

Section: F Immobilization Layermentioning

confidence: 99%

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Fabrication and Characterization of a Polymeric Microcantilever With an Encapsulated Hotwire CVD Polysilicon Piezoresistor

Kale

Nag

Pinto

et al. 2009

J. Microelectromech. Syst.

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Abstract-We demonstrate a novel photoplastic nanoelectromechanical device that includes an encapsulated polysilicon piezoresistor. The temperature limitation that typically prevents deposition of polysilicon films on polymers was overcome by employing a hotwire CVD process. In this paper, we report the use of this process to fabricate and characterize a novel polymeric cantilever with an embedded piezoresistor. This device exploits the low Young's modulus of organic polymers and the high gauge factor of polysilicon. The fabricated device fits into the cantilever holder of an atomic force microscope (AFM) and can be used in conjunction with the AFM's liquid cell for detecting the adsorption of biochemicals. It enables differential measurement while preventing biochemicals from interfering with measurements using the piezoresistor. The mechanical and electromechanical characterization of the device is also reported in this paper. [2008-0108]Index Terms-Affinity cantilevers, bio-microelectromechanical system (bio-MEMS), hotwire CVD (HWCVD), piezoresistive sensing, polymeric cantilevers, surface stress.

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“…For maximum sensitivity of cantilever biosensors, the selective immobilization of biomolecules is a prerequisite, since immobilization on both faces is expected to elicit a weaker response [4]. Studies have concentrated on the mechanical and electrical design of multilayer piezoresistive cantilevers, such as those for atomic force microscope cantilevers [5] as well as affinity cantilevers [6], [7]. For those affinity cantilevers, the electrical sensitivity, i.e., change in resistance due to applied surface stress (ΔR/R) is less than one part per million (1 × 10 −6 -1 × 10 −7 ) which can get suppressed by electrical noise.…”

Section: Introductionmentioning

confidence: 99%

Modeling, Simulation, and Design Guidelines for Piezoresistive Affinity Cantilevers

Joshi

Gandhi

Lal

et al. 2011

J. Microelectromech. Syst.

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This paper presents design guidelines for piezoresistive affinity cantilevers for operation in liquid environments. For the first time, we consider the interdependence of various functional elements (such as biological, mechanical, and electrical) of the cantilever, their dependence on material choice, microfabrication processes, and geometry, and the resultant effects on the mechanical and electrical sensitivities of the cantilever. The cantilever design guidelines that include material selection as well as determination of geometrical dimensions are proposed. As an example, we have designed and simulated a multilayer piezoresistive silicon nitride affinity cantilever for performance in a liquid environment under constraints imposed by microfabrication and electrical and mechanical considerations. Systematic steps toward optimization of geometrical dimensions include initial analytical estimates of geometrical dimensions, followed by finite-element modeling and analysis of such cantilevers under the applied surface stress. Simulation studies brought forth the limitation on maximum obtainable ΔR/R as well as the nonlinear behavior of the cantilever which was not observed in analytical estimates.[2010-0116]

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Design and Fabrication Issues in Affinity Cantilevers for bioMEMS Applications

Cited by 21 publications

References 8 publications

Nano/Micro-Electro-Mechanical Systems for Sensor Applications: A Brief Review

Nano/Micro-Electro-Mechanical Systems for Sensor Applications: A Brief Review

Fabrication and Characterization of a Polymeric Microcantilever With an Encapsulated Hotwire CVD Polysilicon Piezoresistor

Modeling, Simulation, and Design Guidelines for Piezoresistive Affinity Cantilevers

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