Design and fabrication of a micro fuel cell array with “flip-flop” interconnection

Lee, Sang Joon John; Chang-Chien, A.; W., S.; O’Hayre, Ryan; Park, Y. I.; Saito, Yuji; Prinz, Fritz B.

doi:10.1016/s0378-7753(02)00393-2

Cited by 225 publications

(116 citation statements)

References 7 publications

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“…Bulk micromachining of metals and semiconductors has been widely investigated and developed in the fields of electronic devices, micromachining, and nanotechnology [1][2][3][4][5]. Aluminum is generally used for circuit materials, cold plates, and heat sinks due to its low electrical resistivity (2.66 x 10 -8 Ωm) and high thermal conductivity (237 Wm -1 K -1 ) [6], and it is important to develop more precise and smaller bulk micromachining of aluminum for micro-and nano-structure fabrication.…”

Section: Introductionmentioning

confidence: 99%

Aluminum bulk micromachining through an anodic oxide mask by electrochemical etching in an acetic acid/perchloric acid solution

Kikuchi

Wachi

Sakairi

et al. 2013

Microelectronic Engineering

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A well-defined microstructure with microchannels and a microchamber was fabricated on an aluminum plate by four steps of a new aluminum bulk micromachining process: anodizing, laser irradiation, electrochemical etching, and ultrasonication. An aluminum specimen was anodized in an oxalic acid solution to form a porous anodic oxide film. The anodized aluminum specimen was irradiated with a pulsed Nd-YAG laser to locally remove the anodic oxide film, and then the exposed aluminum substrate was selectively dissolved by electrochemical etching in an acetic acid / perchloric acid solution. The anodic oxide film showed good insulating properties as a resist mask during electrochemical etching in the solution. A hemicylindrical microgroove with thin free-standing anodic oxide on the groove was fabricated by electrochemical etching, and the groove showed a smooth surface with a calculated mean roughness of 0.2 -0.3 µm. The free-standing oxides formed by electrochemical etching were easily removed from the specimen by ultrasonication in an ethanol solution. Microchannels 60 µm in diameter and 25 µm in depth connected to a microchamber were successfully fabricated on the aluminum.

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Section: Introductionmentioning

confidence: 99%

Aluminum bulk micromachining through an anodic oxide mask by electrochemical etching in an acetic acid/perchloric acid solution

Kikuchi

Wachi

Sakairi

et al. 2013

Microelectronic Engineering

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“…One possible approach for adding and combining multiple micro FCs to a microfabricated power source is to concatenate them in a planar or co-planar structure (such as in [3][4][5][6][7][8][9][10][11][12][13]), in which case there is no real stack, but rather a cluster of micro FCs placed laterally next to each other in the same plane. This approach is often used in microfabrication, because it will simplify either the placement and fabrication of gas interconnects or the placement and fabrication of electrical interconnects.…”

Section: Introductionmentioning

confidence: 99%

Simple Stacking Methods for Silicon Micro Fuel Cells

et al. 2014

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We present two simple methods, with parallel and serial gas flows, for the stacking of microfabricated silicon fuel cells with integrated current collectors, flow fields and gas diffusion layers. The gas diffusion layer is implemented using black silicon. In the two stacking methods proposed in this work, the fluidic apertures and gas flow topology are rotationally symmetric and enable us to stack fuel cells without an increase in the number of electrical or fluidic ports or interconnects. Thanks to this simplicity and the structural compactness of each cell, the obtained stacks are very thin (~1.6 mm for a two-cell stack). We have fabricated two-cell stacks with two different gas flow topologies and obtained an open-circuit voltage (OCV) of 1.6 V and a power density of 63 mW·cm −2 , proving the viability of the design.

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“…Because μFCs are widely considered to be a major candidate for the micro scaled power generation with higher energy densities than the most competitive rechargeable batteries, many researchers have taken great labor in fabrication of μFCs or its components [2][3][4][5][6][7][8][9][10][11][12][13][14][15]. However, apart from the good designs and advanced materials, miniaturizing fuel cells for micro scaled power source is actually hindered by the difficulty of reducing their physical dimensions because macro-sized fuel cell components (such as bipolar plates and fuel storage cans) are often limited by their characteristic fabrication technology constraints.…”

Section: Introductionmentioning

confidence: 99%

“…In fact, for the practical *Address correspondence to this author at the Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China; Tel: 86-21-62511070-8813; Fax: 86-21-524139930; E-mail: zhangxigui@mail.sim.ac.cn uses, several or even hundreds of single cells are needed to be serially grouped or integrated to offer the required voltage and power. From our knowledge, only a few of packs fabricated by MEMS technology were reported or proposed [14][15][16]. For example, Lee et al [14] reported a micro fuel cell pack in which a planar array of cells is serially connected in a "flip-flop" configuration.…”

Section: Introductionmentioning

confidence: 99%

“…From our knowledge, only a few of packs fabricated by MEMS technology were reported or proposed [14][15][16]. For example, Lee et al [14] reported a micro fuel cell pack in which a planar array of cells is serially connected in a "flip-flop" configuration. The peak power in a 4-cell silicon assembly was reported to reach 40 mW/cm 2 using hydrogen and oxygen as fuel and oxidizer.…”

Section: Introductionmentioning

confidence: 99%

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Investigation of a Micro PEM Fuel Cell Pack Based on MEMS Technology

Wang¹,

Zhang²,

Zhang³

et al. 2008

TOEFJ

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Investigation of a micro PEM fuel cell pack based on MEMS technology is carried out in this paper. A Novel type of Z-type anode flow field plates were applied to replace the full pin-type ones used previously and all the single cells were assembled in the same plane with a fuel distributor as their support. The total pack's volume is about 4.0ml. Operating on dry H 2 and air-breathing conditions at 20±3°C and 50±3% RH, the pack produced the peak power of 1.34W and the estimated maximum power density of the pack could reach 335W/L. Meanwhile, all the single cells had rather even performances which were based on V-I and internal resistance measurement (EIS). The results suggested that the pack's performance was greatly improved compared to the previous work. The novel Z-type anode flow field leading to more even fuel distribution among each cell probably had the greatest contribution for the improvement.

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Design and fabrication of a micro fuel cell array with “flip-flop” interconnection

Cited by 225 publications

References 7 publications

Aluminum bulk micromachining through an anodic oxide mask by electrochemical etching in an acetic acid/perchloric acid solution

Aluminum bulk micromachining through an anodic oxide mask by electrochemical etching in an acetic acid/perchloric acid solution

Simple Stacking Methods for Silicon Micro Fuel Cells

Investigation of a Micro PEM Fuel Cell Pack Based on MEMS Technology

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