Design and Fabrication of a MEMS 3D Micro-transformer for Low Frequency Applications

Ahmed, Mohammad Zayed; Bhuyan, M. S.; Islam, Aminul; Majlis, Burhanuddin Yeop

doi:10.3923/ajsr.2015.237.244

Cited by 9 publications

(7 citation statements)

References 14 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…For the coplanar devices with racetrack geometry, k values up to 0.93 have been reported by Wang et al [71], [78], but inductance values were relatively low (just a few dozens of nH). Ahmed et al were able to build a device with high inductance values (L1 = 90 µH and L2 = 164 µH at 1 kHz) in a footprint area of 2.56×1.24 mm 2 using a solenoidracetrack with a Ni-Fe Permalloy core [83]. The authors also reported a 73.75% efficiency at 50 kHz using a 1 kΩ load resistor, which is a good result for a microtransformer.…”

Section: Racetrackmentioning

confidence: 98%

“…Regarding the performances, only a few authors determined the k and Q parameters for microtransformers using the racetrack geometry. Some articles reported coupling coefficients for racetrack solenoid devices to be in the 0.5-0.9 range, but in most cases custom-made core materials were used, instead of those commercially available [43], [47], [61], [70], [83]. For the coplanar devices with racetrack geometry, k values up to 0.93 have been reported by Wang et al [71], [78], but inductance values were relatively low (just a few dozens of nH).…”

Section: Racetrackmentioning

confidence: 99%

See 1 more Smart Citation

A Survey on Microtransformers

Nascimento

Telles

Joanni

et al. 2021

JICS

View full text Add to dashboard Cite

The miniaturization of magnetic devices is a subject of enduring interest, since inductors and transformers of very small dimensions are constantly being required for integration into microchips and electrical circuit boards. The main objective of this survey is to supply a compilation of the published research on microtransformers, and to work as a support material, helping in the choice of the most appropriate technology and device configuration for a particular application. The text describes the historical development of microtransformers, the structures in which these devices might be assembled, the various proposed geometries, the fabrication processes, and the type of core used. A brief discussion of equivalent circuit modeling is presented. The current state of the technology in relation to commercial devices is then examined, pointing out some unsolved problems that warrant further studies.

show abstract

Section: Racetrackmentioning

confidence: 98%

Section: Racetrackmentioning

confidence: 99%

A Survey on Microtransformers

Nascimento

Telles

Joanni

et al. 2021

JICS

View full text Add to dashboard Cite

show abstract

“…Considering this issue, there have been attempts to fabricate on-chip transformers with integrated magnetic cores [86,87,88,89,90]. In one study, a micro-assembly system with robotic microgripper was introduced to fabricate out-of-plane 3D microstructures [86].…”

Section: Design Strategies and Mems Process Flows To Improve On-chmentioning

confidence: 99%

“…In such a fabrication strategy, the transformer windings consist of two layers of conductors between which a magnetic core is sandwiched, and vias are used to connect the top and bottom conductor layers [87] (Figure 7b). With this approach, an on-chip transformer with a magnetic core of 7-µm-thick patterned Permalloy (Ni-Fe) was fabricated, and characterized to exhibit inductance values of 90 µH and 164 µH for primary (10 turns) and secondary windings (18 turns) respectively, for frequencies below 600 kHz [88]. Similar fabrication approach with improved transformer design to realize monolithic transformers with Ni-Fe-W core was also reported where high frequency transformer operation reaching 70 MHz was achieved [87] (Figure 7c).…”

Section: Design Strategies and Mems Process Flows To Improve On-chmentioning

confidence: 99%

Integrated On-Chip Transformers: Recent Progress in the Design, Layout, Modeling and Fabrication

Bajwa

Yapıcı

2019

Sensors

View full text Add to dashboard Cite

On-chip transformers are considered to be the primary components in many RF wireless applications. This paper provides an in-depth review of on-chip transformers, starting with a presentation on the various equivalent circuit models to represent transformer behavior and characterize their performance. Next, a comparative study on the different design and layout strategies is provided, and the fabrication techniques for on-chip implementation of transformers are discussed. The critical performance parameters to characterize on-chip transformers, such as the Q-factor, coupling factor (k), resonance frequency (fSR), and others, are discussed with reference to trade-offs in silicon chip real-estate. The performance parameters and area requirements for different types of on-chip transformers are summarized in tabular form and compared. Several techniques for performance enhancement of on-chip transformers, including the different types of micromachining and integration approaches stemming from MEMS (microelectromechanical systems) technologies are also analyzed. Lastly, the different uses and applications of on-chip transformers are discussed to highlight the evolution of on-chip transformer technology over the recent years and provide directions for future work in this field.

show abstract

“…Electroplated permalloy (Ni81Fe19) has been widely used for magnetic flux concentrators [1], [2] and micro transformers [3]- [7] due to their high magnetic permeability and small coercivity.…”

Section: Introductionmentioning

confidence: 99%

Effect of Substrate Temperature on Magnetic Properties of Electroplated 82Ni–15Fe–3W Alloy Films

2016

View full text Add to dashboard Cite

Nanocrystalline soft magnetic Ni-Fe-W alloy films are electroplated by applying different substrate temperature. In this study, the effect of substrate temperatures on the magnetic properties is investigated. The morphology and composition of the plated layers are determined by atomic force microscope and scanning electron microscope equipped with an energy dispersive X-ray spectroscopy detector, respectively. Structure and average grain size are characterized by the X-ray diffraction analysis. Magnetic properties of the plated alloy are determined by using the vibrating sample magnetometer. The results show that the coercivity and relative permeability of the plated films can be optimized by changing the substrate temperature. The lowest coercivity value of 257 A/m and high relative permeability value of 487 are obtained at substrate temperature value of 5 ºC. Plated alloy films have face centered cubic structure. Additionally, an increasing in the substrate temperature results in an increase in the strain and roughness.

show abstract

Design and Fabrication of a MEMS 3D Micro-transformer for Low Frequency Applications

Cited by 9 publications

References 14 publications

A Survey on Microtransformers

A Survey on Microtransformers

Integrated On-Chip Transformers: Recent Progress in the Design, Layout, Modeling and Fabrication

Effect of Substrate Temperature on Magnetic Properties of Electroplated 82Ni–15Fe–3W Alloy Films

Contact Info

Product

Resources

About