Design And Fabrication of Anautomatic Mode Controlled Vibratory Gyroscope

Sung, Woon-Tahk; Lee, J.Y.; Lee, J.G.; Kang, Taesam

doi:10.1109/memsys.2006.1627889

Cited by 10 publications

(5 citation statements)

References 4 publications

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“…Moreover, once the mode is matched, the sensor bandwidth can be controlled by varying Vp to separate the drive and sense resonant frequencies. Another method for mode matching is implemented in [ 191 , 192 ], where it is achieved by adjusting (like PLL) the 90° out-of-phase relationship between drive frequency and sense frequency. The control voltage of mode-matching loop changes the phase of output signal.…”

Section: Micromachined Gyroscope Circuitrymentioning

confidence: 99%

The Development of Micromachined Gyroscope Structure and Circuitry Technology

Xia

Kong

2014

Sensors

196

107

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This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

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Section: Micromachined Gyroscope Circuitrymentioning

confidence: 99%

The Development of Micromachined Gyroscope Structure and Circuitry Technology

Xia

Kong

2014

Sensors

196

107

View full text Add to dashboard Cite

show abstract

“…The phase relationships between the drive mode and the sense mode or the quadrature signal can also be used to fulfill mode-matching with high control accuracy [3][4], however, it is complicated to be implemented due to the uncertain parasitic phase shift stemmed from the readout circuits. Furthermore, all these automatic mode-matching control approaches will fail to work when Coriolis acceleration appears.…”

Section: Introductionmentioning

confidence: 99%

An automatic real-time mode-matching MEMS gyroscope with fuzzy and neural network control

Zhao

Liu

et al. 2013

2013 Transducers &Amp; Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

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This paper reports a novel method to accomplish automatic and real-time mode-matching control for a MEMS vibratory gyroscope based on fuzzy and neural network algorithms. Experimental results demonstrate that it only needs about 8 seconds to fulfil mode-matching automatically in the fuzzy control system, and a mismatching error lower than 0.32Hz is achieved over the temperature range from -40°C to 80°C in the neural network real-time control system. The scale factor of the mode-matched gyroscope with the closed loop controlled sense mode is measured to be 65.9 mV/deg/s with nonlinearity about 0.03%, and the bias instability and the angle random walk (ARW) are evaluated to be 0.68 deg/h and 0.028 deg/h 1/2 , respectively.

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“…Since post-manufacturing techniques require manual tunings, they are not suitable for mass production [7] and hence, the second group tries to implement closed loop control techniques to match the modes. For instance, Sung et al [7][8][9] provided resonance in both modes through phase-locked loop (PLL) control, and Park et al [10][11][12][13] used adaptive force control for this purpose.…”

Section: Introductionmentioning

confidence: 99%

“…For instance, Sung et al [7][8][9] provided resonance in both modes through phase-locked loop (PLL) control, and Park et al [10][11][12][13] used adaptive force control for this purpose.…”

Section: Introductionmentioning

confidence: 99%

Stability analysis of a new class of MEMS gyroscopes with parametric resonance

2012

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In this paper, a parametrically resonated MEMS gyroscope is considered, and the effect of its parameters on the system stability is studied. Unlike the general case of MEMS gyroscopes with harmonic excitation, in this new class of gyroscopes with parametric excitation, the origin is one stationary point of the system. The study starts with the stability analysis of the origin, and then it goes on to analyze the effect of each parameter on the stability of periodic orbits. Stabilities are studied by means of Floquet theory. As the results indicate, presence of a non-trivial response for the system is closely interconnected to the stabilities (and instabilities) of the system. It is demonstrated that the stability of the origin always contributes to a zero response for the sensor, and hence the instability of origin is required for the occurrence of parametric resonance. In contrast, stability of a periodic orbit does not necessarily guarantee a resonant response for the gyroscope, and again it is the instability of the origin which is required for this purpose. Because in the case of linear stiffness-linear parametric excitation the instability of the origin results in instability of the system, it is concluded that nonlinearities are required for a parametrically actuated gyroscope.

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Design And Fabrication of Anautomatic Mode Controlled Vibratory Gyroscope

Cited by 10 publications

References 4 publications

The Development of Micromachined Gyroscope Structure and Circuitry Technology

The Development of Micromachined Gyroscope Structure and Circuitry Technology

An automatic real-time mode-matching MEMS gyroscope with fuzzy and neural network control

Stability analysis of a new class of MEMS gyroscopes with parametric resonance

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