An automatic real-time mode-matching MEMS gyroscope with fuzzy and neural network control

He, Chunhua; Zhao, Qiancheng; Liu, D. C.; Dong, Liguo; Yang, Zhenchuan; Yan, Guizhen

doi:10.1109/transducers.2013.6626699

Cited by 10 publications

(5 citation statements)

References 6 publications

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“…Based on the current The phase margin, gain margin, and sensitivity margin calculated from the experimental data reach the theoretical values. The system has sufficient stability and robustness in the temperature range of −40~80 • C. In addition, the gyroscope has a maximum bandwidth of 85 Hz and a bias instability of 5 • /h under closed-loop control [35].…”

Section: Discussionmentioning

confidence: 99%

“…The system has sufficient stability and robus in the temperature range of −40~80 °C. In addition, the gyroscope has a maximum b width of 85 Hz and a bias instability of 5°/h under closed-loop control [35]. The three-layer BP (back propagation) neural network algorithm is used for control, as shown in Figure 18.…”

Section: Emerging Algorithms Incorporated Modal Matching Technologymentioning

confidence: 99%

“…in the temperature range of −40~80 °C. In addition, the gyroscope has a maximum bandwidth of 85 Hz and a bias instability of 5°/h under closed-loop control [35]. Later, the researchers at Hohai University (Nanjing, China) also used a fuzzy neural network algorithm to realize the stability control of the gyroscope.…”

Section: Emerging Algorithms Incorporated Modal Matching Technologymentioning

confidence: 99%

“…The fourth part introduces the tuning method incorporating emerging algorithms. The fuzzy and neural network control are typical algorithms [35][36][37][38].…”

mentioning

confidence: 99%

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A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies

Zhang

Chen

et al. 2022

Micromachines

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The symmetric MEMS gyroscope is a typical representative of inertial navigation sensors in recent years. It is different from the traditional mechanical rotor gyroscope in that it structurally discards the high-speed rotor and other moving parts to extend the service life and significantly improve accuracy. The highest accuracy is achieved when the ideal mode-matching state is realized. Due to the processing limitation, this index cannot be achieved, and we can only explore ways to approach this index continuously. This paper’s results of error suppression for the symmetric MEMS gyroscope are initially classified into three categories. The first category mainly introduces the processing structure and working mode of the symmetrical gyroscope. The second is mechanical tuning from the structure and the third is electrostatic tuning from the peripheral control circuit. Based on the listed results, the paper compares the two tuning modes and analyzes their advantages and disadvantages. The fourth category is the tuning means incorporating the emerging algorithm. On this basis, the elements of improvement for future high-precision symmetric MEMS gyroscopes are envisioned to provide a part of the theoretical reference for the future development direction of sensors in inertial navigation.

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Section: Discussionmentioning

confidence: 99%

Section: Emerging Algorithms Incorporated Modal Matching Technologymentioning

confidence: 99%

Section: Emerging Algorithms Incorporated Modal Matching Technologymentioning

confidence: 99%

“…The fourth part introduces the tuning method incorporating emerging algorithms. The fuzzy and neural network control are typical algorithms [35][36][37][38].…”

mentioning

confidence: 99%

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A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies

Zhang

Chen

et al. 2022

Micromachines

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“…However, this method will enhance the difficulty of Coriolis signal detection. Fuzzy and neural network control algorithms are also used to predict tuning voltage in [25,26]. This intelligent control system can fulfill mode-matching within 8 s, but it is a one-time control method which will become invalid when micro-gyroscope undergoes a Coriolis acceleration.…”

Section: Introductionmentioning

confidence: 99%

A Digital Calibration Technique of MEMS Gyroscope for Closed-Loop Mode-Matching Control

Yang

Guo

et al. 2019

Micromachines

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A digital excitation-calibration technique of dual-mass MEMS gyroscope for closed-loop mode-matching control is presented in this paper. The technique, which takes advantage of the symmetrical amplitude response of MEMS gyroscope, exploits a two-side excitation signal to actuate the sense mode to obtain the corresponding DC tuning voltage. The structural characteristics of dual-mass decoupled MEMS gyroscope and the tuning principle of excitation-calibration technique are introduced firstly. Then, the scheme of digital excitation-calibration system for the real-time mode-matching control is presented. Simultaneously, open-loop analysis and closed-loop analysis are deduced, respectively, to analyze the sources of tuning error and system stability. To verify the validity of the scheme and theoretical analysis, the system model was established by SIMULINK. The simulation results are proved to be consistent with the theoretical analysis, verifying the feasibility of the digital excitation-calibration technique. The control algorithms of the system were implemented with a FPGA device. Experimental results demonstrate that digital excitation-calibration technique can realize mode-matching within 1 s. The prototype with real-time mode-matching control has a bias instability of 0.813 ∘ /h and an ARW (Angular Random Walk) of 0.0117 ∘ / h . Compared to the mode-mismatching condition, the bias instability and ARW are improved by 3.25 and 4.49 times respectively.

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A Micromachined Vibratory Gyroscope

Zhao

Cui

et al. 2017

Toxinology

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An automatic real-time mode-matching MEMS gyroscope with fuzzy and neural network control

Cited by 10 publications

References 6 publications

A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies

A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies

A Digital Calibration Technique of MEMS Gyroscope for Closed-Loop Mode-Matching Control

A Micromachined Vibratory Gyroscope

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