Design and fabrication of micro optical components for optical data storage by micromolding

Kang, Shinill; Moon, Su-Dong

doi:10.1109/cleopr.2001.970787

Cited by 3 publications

(2 citation statements)

References 3 publications

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“…Silicon was selected as the master material in this study because it satisfied both requirements. A PR pattern of the microlens array was manufactured using the reflow method [5][6][7][8].…”

Section: Lens Master Fabrication By Rie Methodsmentioning

confidence: 99%

Design and fabrication of tungsten carbide mould with micro patterns imprinted by micro lithography

Choi

Lee

Kim

et al. 2004

J. Micromech. Microeng.

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Core fabrication is one of the key technologies of glass moulding process used in micro optical component manufacturing. However, when the cavity size is very small and an array-type cavity is needed, a conventional diamond turning process cannot be employed. In this study, a novel core fabrication method that can be used for glass micro optical components has been developed. First, microlens array (with individual lens diameters of 36–300 µm) mould masters were produced with silicon using a photoresist reflow and a reactive ion etching process. Then, the shape of the silicon lens masters was transferred to tungsten carbide cores using a powder pressure forming and a sintering process. To further improve the surface qualities, magnetic abrasive finishing was carried out. The details of the fabrication process are presented in this paper. The characteristics of the proposed method, such as the shrinkage in the sintering process and the effects of grain size of the tungsten carbide powder and abrasive finishing process on the surface qualities, were also discussed.

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Section: Lens Master Fabrication By Rie Methodsmentioning

confidence: 99%

Design and fabrication of tungsten carbide mould with micro patterns imprinted by micro lithography

Choi

Lee

Kim

et al. 2004

J. Micromech. Microeng.

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“…In general, microlens and lens array can be produced using various methods such as photoresist reflow method, etching, lithography, laser ablation, microjet method, and molding (Kang and Moon 2001;Kim et al 2003;Moon et al 2002Moon et al , 2003. The molding process, which includes injection molding, compression molding, hot embossing and UV molding, is regarded as the most suitable process to achieve high repeatability and high mass production capacity.…”

Section: Fabrication Of Micro-compensatory Lensmentioning

confidence: 99%

Design of optical path of pickup for small form factor optical disk drive

et al. 2005

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We designed an optical path of pickup for the small form factor optical disk drive that is compatible with Blu-ray Disc format using 405 nm wavelength laser, 0.85 NA objective lens, and the 0.1-mm thick cover layer. The optical path consists of a high NA objective lens, a micro compensatory lens that is fabricated by micro-molding process, three reflective mirrors and a partial mirror. The optical performance of the optical path is analyzed and the expected yield ratio is calculated for 22 tolerance parameters by using Monte Carlo method. Finally, the micro compensatory lens is fabricated by micro-molding process.

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Fabrication of polymeric microlens of hemispherical shape using micromolding

Moon

2002

Opt. Eng

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Design and fabrication of micro optical components for optical data storage by micromolding

Cited by 3 publications

References 3 publications

Design and fabrication of tungsten carbide mould with micro patterns imprinted by micro lithography

Design and fabrication of tungsten carbide mould with micro patterns imprinted by micro lithography

Design of optical path of pickup for small form factor optical disk drive

Fabrication of polymeric microlens of hemispherical shape using micromolding

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