2010
DOI: 10.1109/jmems.2010.2055548
|View full text |Cite
|
Sign up to set email alerts
|

Design and Fabrication of Monolithic Multidimensional Data Registration CMOS/MEMS Ink-Jet Printhead

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2015
2015
2022
2022

Publication Types

Select...
3

Relationship

0
3

Authors

Journals

citations
Cited by 3 publications
(1 citation statement)
references
References 27 publications
0
1
0
Order By: Relevance
“…In the past decades, some research on the preparation technology of inkjet printhead chambers has been reported. Liou et al (2010) fabricated a monolithic thermal inkjet printhead based on MEMS fabrication processes including the sacrificial layer process, and the results showed that the major advantage of the inkjet chip assembly processes is improved throughput [ 22 ]. Wang et al (2019) fabricated chambers of inkjet printheads by thermal bonding an SU-8 nozzle plate with a suitable crosslinked degree; the results showed that the optimized bonding strength of 0.57 MPa and chamber deformation rate of 4.35% were obtained in the final inkjet printhead [ 17 ].…”
Section: Introductionmentioning
confidence: 99%
“…In the past decades, some research on the preparation technology of inkjet printhead chambers has been reported. Liou et al (2010) fabricated a monolithic thermal inkjet printhead based on MEMS fabrication processes including the sacrificial layer process, and the results showed that the major advantage of the inkjet chip assembly processes is improved throughput [ 22 ]. Wang et al (2019) fabricated chambers of inkjet printheads by thermal bonding an SU-8 nozzle plate with a suitable crosslinked degree; the results showed that the optimized bonding strength of 0.57 MPa and chamber deformation rate of 4.35% were obtained in the final inkjet printhead [ 17 ].…”
Section: Introductionmentioning
confidence: 99%