2004
DOI: 10.1063/1.1775312
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Design and fabrication of physical vapor transport system for the growth of SiC crystals

Abstract: A physical vapor transport (PVT) system has been designed and fabricated for growing SiC single crystals. Novel multisegmented graphite insulation has been used for improved heat containment in the hotzone. Numerical modeling was applied to obtain the temperature field inside the hotzone, which also helped in predicting various growth parameters. Single crystals of 6H SiC were grown by the modified Lely method using the PVT system developed in the laboratory. The grown crystals were subjected to preliminary ch… Show more

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Cited by 7 publications
(5 citation statements)
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“…The compacted SiC charge has to fit into the crucible, the diameter of the charge cylinder is therefore smaller than the crucible. However, the gap between the charge and inner crucible wall is usually very small ($1 mm) so the initial gap is neglected in thermal analysis due to strong radiation [21].…”
Section: Heat Transfer In Porous Mediamentioning
confidence: 99%
See 1 more Smart Citation
“…The compacted SiC charge has to fit into the crucible, the diameter of the charge cylinder is therefore smaller than the crucible. However, the gap between the charge and inner crucible wall is usually very small ($1 mm) so the initial gap is neglected in thermal analysis due to strong radiation [21].…”
Section: Heat Transfer In Porous Mediamentioning
confidence: 99%
“…Furthermore, the effect of a central hole in the powder on the sublimation rate is studied and result is compared to the case of the packed powder without a hole Fig. 1 shows a SiC sublimation growth system being studied in this paper [21]. The considered system is axisymmetric.…”
Section: Introductionmentioning
confidence: 99%
“…The 6H SiC bulk crystals and epitaxial films were grown in PVT [6] and CVD [7] systems developed in our laboratory. The hot-zones were fabricated with the knowledge of the temperature distribution obtained from numerical modeling.…”
Section: Growth Of Bulk and Epitaxial Sicmentioning
confidence: 99%
“…3C–SiC, 2H–SiC, 4H–SiC, and 6H–SiC are the most common phases. SiC can be synthesized by chemical vapor deposition (CVD) [14, 15, 16, 17, 18], vapor liquid solid (VLS) [19, 20, 21, 22, 23] and physical vapor transport (PVT) [24, 25, 26, 27, 28] methods. Silicon carbide has been used in photovoltaic solar cells (PVSC) [29, 30, 31, 32, 33, 34, 35] for decades.…”
Section: Introductionmentioning
confidence: 99%