Design and Fabrication of SAW Resonators on Silicon Substrate Employing Transverse BAW in Patterned ZnO

High Quality Factor Hybrid SAW/BAW Resonators

“…Additionally, many works focused on delay lines. Thus, so far, no work on hybrid SAW/BAW resonators has reported an experimental quality factor [2][3][4]. In this work, we introduce an optimized fabrication process allowing to define transducers with a periodicity down to 1 µm and thicknesses up to 2 µm, and demonstrate that clean and sharp resonances can indeed be achieved at the theoretically expected frequencies.…”