2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) 2022 Help me understand this report
High Quality Factor Hybrid SAW/BAW Resonators
Abstract: We report hybrid SAW/BAW resonators based on arrays of AlN/Mo transducers located atop a silicon substrate. Thanks to an optimized fabrication process, these devices exhibit quality factors up to 3,900 and 1,700 respectively for the pseudo-SAW and pseudo-BAW modes, at frequencies close to 600 MHz and 2.9 GHz.
Search citation statements
Paper Sections
Select...
Citation Types
0
0
0
Year Published
2023
2024
Publication Types
Select...
3
1
Relationship
0
4
Authors
Journals
Cited by 4 publications
References 5 publications
0
0
0
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.
Copyright © 2025 scite LLC. All rights reserved.
Made with đź’™ for researchers
