Design and fabrication of superconducting transition edge sensor bolometers with background limited noise performance

Optical response of Al/Ti bilayer transition edge sensors

“…The details of the device fabrication and the noise performance of TES B have been described elsewhere. [9] (a) TES A (b) TES B…”

“…In our previous work, we reported the noise performance of the fabricated Al/Ti bilayer TESs. [9] The TES with four 540 µm × 30 µm supporting SiN legs as the thermal links showed a noise equivalent power (NEP) around 8.0×10 −17 W/Hz 1/2 , which is good enough for some bolometric applications in astrophysics. [9] Besides the noise performance, the response speed and the linearity of the response are two other important aspects for TESs when they are used as bolometric detectors.…”

“…[9] The TES with four 540 µm × 30 µm supporting SiN legs as the thermal links showed a noise equivalent power (NEP) around 8.0×10 −17 W/Hz 1/2 , which is good enough for some bolometric applications in astrophysics. [9] Besides the noise performance, the response speed and the linearity of the response are two other important aspects for TESs when they are used as bolometric detectors. [10,11] In this paper, we report the optical response characteristics of the Al/Ti bilayer TESs to near infrared optical pulses generated by a pulsed laser source.…”

Superconductivity of bilayer titanium/indium thin film grown on SiO 2 /Si (001)

“…Because of its high thermal sensitivity, it has wide applications in many areas, including single photon detectors from near-infrared to γ-ray, cosmic microwave background bolometers, and dark matter detectors. [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15] The T c of a bilayer superconducting thin film system could be tuned in a well controlled way by just tuning the thickness ratio of the two elements. Many bilayer systems, such as Mo/Au, Mo/Cu, Ti/Au, and Ti/Al systems, [1,11,[16][17][18][19][20][21] have been chosen for fabricating the TESs.…”

Aluminum–Titanium Bilayer for Near-Infrared Transition Edge Sensors

“…TESs based on an Al/Ti bilayer have already been used as bolometers for astrophysical applications at far-infrared and millimeter wavelengths [ 9 , 10 ]. Recently, also in the optical range, a characterization of a suspended TES bolometer has been published [ 11 ].…”