Design and Fabrication of ZnO-Based FBAR Microwave Devices for Mobile WiMAX Applications

Mai, Linh; Lee, Jae-Young; Pham, Van-Su; Yoon, Giwan

doi:10.1109/lmwc.2007.910495

Cited by 6 publications

(4 citation statements)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…However, the output voltages of these devices were not stably generated or as high as expected, possibly because of wrinkling or cracking of the stacked films. To resolve this issue, a thin layer of Cr was deposited to enhance the adhesion between the ZnO and ITO films [26,27], and Ag/ZnO/Cr/ITO/Al-foil structured devices were also fabricated. The surface morphologies of the two different structures, those with and without the Cr layer, after a bending test were investigated using a microscope (S39A, Microscopes Inc., Saint Louis, MO, USA).…”

Section: Methodsmentioning

confidence: 99%

“…In this work, to further improve Al-foil-based energy harvesters, we deposited chromium (Cr) as an interlayer to enhance the adhesion between the two adjoined film layers in the device. Other researchers have used chromium (Cr) as a metal electrode [10,25] as well as a thin film layer [26,27] to improve the adhesion quality. Considering these advantages, we deposited a Cr interlayer below the zinc oxide (ZnO) thin film and above the indium tin oxide (ITO) bottom electrode.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

A Feasibility Study of Fabrication of Piezoelectric Energy Harvesters on Commercially Available Aluminum Foil

2019

Self Cite

View full text Add to dashboard Cite

In this paper, we present zinc oxide (ZnO)-based flexible harvesting devices employing commercially available, cost-effective thin aluminum (Al) foils as substrates and conductive bottom electrodes. From the device fabrication point of view, Al-foils have a relatively high melting point, allowing for device processing and annealing treatments at elevated temperatures, which flexible plastic substrate materials cannot sustain because of their relatively low melting temperatures. Moreover, Al-foil is a highly cost-effective, commercially available material. In this work, we fabricated and characterized various kinds of multilayered thin-film energy harvesting devices, employing Al-foils in order to verify their device performance. The fabricated devices exhibited peak-to-peak output voltages ranging from 0.025 V to 0.140 V. These results suggest that it is feasible to employ Al-foils to fabricate energy-efficient energy harvesting devices at relatively high temperatures. It is anticipated that with further process optimization and device integration, device performance can be further improved.

show abstract

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A Feasibility Study of Fabrication of Piezoelectric Energy Harvesters on Commercially Available Aluminum Foil

2019

Self Cite

View full text Add to dashboard Cite

show abstract

“…FBAR utilizes the longitudinal wave resonate characteristics of piezoelectric materials such as AlN or ZnO to realize electrical frequency selection [3,4]. Acoustic waves are about five orders of magnitude shorter than electromagnetic waves, resulting in significantly small size.…”

Section: Introductionmentioning

confidence: 99%

Full Wave Simulation and Design of Film Bulk Acoustic Wave Filters

Lin

et al. 2018

MATEC Web Conf.

View full text Add to dashboard Cite

Abstract. In order to simulate the frequency response of thin film bulk acoustic wave filter accurately, the MBVD model of film bulk acoustic wave filter chip and three dimension electro-magnetic model of package were respectively established. And then, the collaborative simulation of acoustic and electro-magnetic components was realized in ADS software. Finally, thin film bulk acoustic wave filter with working frequency of 2.825GHz and 5.6 GHz were designed and fabricated by this method. Insertion loss of 2.825GHz FBAR filter is less than 1.5dB, and rejection is more than 40dB. Insertion loss of 5.6GHz FBAR filter is less than 1.7dB, and rejection is more than 30dB. The simulation and experimental results show that the proposed method has good design precision and can simulate the influence of package on the performance of the filter accurately.

show abstract

“…Piezoelectric zinc oxide thin films are widely used for different applications in microelectromechanical systems (MEMS), such as filmbulk acoustic-wave resonators [1], surface-acoustic-wave resonators [2], and acoustic sensors [3], [4]. Various deposition techniques, such as plasma-enhanced chemical-vapor deposition (PECVD) [5], vacuum sputtering [6], and metal-organic chemical-vapor deposition, have been developed for deposition of high-quality ZnO films.…”

Section: Introductionmentioning

confidence: 99%

Controlled Chemical Etching of ZnO Film for Step Coverage in MEMS Acoustic Sensor

Prasad

Yadav

Sahula

et al. 2012

J. Microelectromech. Syst.

View full text Add to dashboard Cite

In this letter, we report a novel wet etching technique of a c-axis-oriented ZnO film that solves the step coverage problem during formation of electrodes on this film. The negative profile or hanging structure of ZnO film deposited by RF magnetron sputtering was obtained during wet etching in HCl and NH 4 Cl solutions. The developed technique uses aqueous NH 4 Cl with electrolytically added copper ions. By suspending the wafer in the horizontal direction in a 20% NH 4 Cl solution, positive slope (more than 90 • ) was obtained at the edge of the ZnO film. In this process, p-type 100 silicon wafers of 10-20-Ω · cm resistivity have been used. Al deposition was done to confirm the step coverage on ZnO film after getting the positive slope. The thickness of ZnO film was varied from 1.3 to 3.4 μm to observe the coverage of sidewall of ZnO film.The structure was also electrically tested and was found to function satisfactorily.[2011-0298]

show abstract

Design and Fabrication of ZnO-Based FBAR Microwave Devices for Mobile WiMAX Applications

Cited by 6 publications

References 8 publications

A Feasibility Study of Fabrication of Piezoelectric Energy Harvesters on Commercially Available Aluminum Foil

A Feasibility Study of Fabrication of Piezoelectric Energy Harvesters on Commercially Available Aluminum Foil

Full Wave Simulation and Design of Film Bulk Acoustic Wave Filters

Controlled Chemical Etching of ZnO Film for Step Coverage in MEMS Acoustic Sensor

Contact Info

Product

Resources

About