Design and implementation of a MEMS-based RF oscillator on a unique silicon-ceramic composite substrate

Stegner, J.; Fischer, M.; Gropp, S.; Stehr, U.; Müller, Jens; Hoffmann, Martin; Hein, Matthias

doi:10.23919/gemic.2018.8335031

Cited by 5 publications

(3 citation statements)

References 7 publications

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“…To test the applicability of the model, a MEMS resonator was designed for a local oscillator operating at long-term evolution (LTE) band 20 with a RF signal at 800 MHz and a LO frequency at 570 MHz [ 26 ]. The oscillator consists of a contour-mode MEMS resonator and an integrated circuit as shown in the top-level schematic in Figure 6 .…”

Section: Methodsmentioning

confidence: 99%

“…It consists of a single-stage common-source amplifier with a 3 dB-bandwidth of 350 MHz and a voltage gain of 24 dB, to compensate for the losses in the resonator and to guarantee a stable oscillation at the specified 570 MHz. Furthermore, a biasing circuit as well as an integrated buffer for the decoupling of the oscillator loop from its load and providing a differential output voltage, were designed in the 180 nm CMOS technology of X-FAB [ 26 , 27 ].…”

Section: Methodsmentioning

confidence: 99%

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An Analytical Temperature-Dependent Design Model for Contour-Mode MEMS Resonators and Oscillators Verified by Measurements

Stegner

Gropp

Podoskin

et al. 2018

Sensors

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The importance of micro-electromechanical systems (MEMS) for radio-frequency (RF) applications is rapidly growing. In RF mobile-communication systems, MEMS-based circuits enable a compact implementation, low power consumption and high RF performance, e.g., bulk-acoustic wave filters with low insertion loss and low noise or fast and reliable MEMS switches. However, the cross-hierarchical modelling of micro-electronic and micro-electromechanical constituents together in one multi-physical design process is still not as established as the design of integrated micro-electronic circuits, such as operational amplifiers. To close the gap between micro-electronics and micro-electromechanics, this paper presents an analytical approach towards the linear top-down design of MEMS resonators, based on their electrical specification, by the solution of the mechanical wave equation. In view of the central importance of thermal effects for the performance and stability of MEMS-based RF circuits, the temperature dependence was included in the model; the aim was to study the variations of the RF parameters of the resonators and to enable a temperature dependent MEMS oscillator simulation. The variations of the resonator parameters with respect to the ambient temperature were then verified by RF measurements in a vacuum chamber at temperatures between −35 ∘C and 85 ∘C. The systematic body of data revealed temperature coefficients of the resonant frequency between −26 ppm/K and −20 ppm/K, which are in good agreement with other data from the literature. Based on the MEMS resonator model derived, a MEMS oscillator was designed, simulated, and measured in a vacuum chamber yielding a measured temperature coefficient of the oscillation frequency of −26.3 ppm/K. The difference of the temperature coefficients of frequency of oscillator and resonator turned out to be mainly influenced by the limited Q-factor of the MEMS device. In both studies, the analytical model and the measurement showed very good agreement in terms of temperature dependence and the prediction of fabrication results of the resonators designed. This analytical modelling approach serves therefore as an important step towards the design and simulation of micro-electronics and micro-electromechanics in one uniform design process. Furthermore, temperature dependences of MEMS oscillators can now be studied by simulations instead of time-consuming and complex measurements.

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Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

An Analytical Temperature-Dependent Design Model for Contour-Mode MEMS Resonators and Oscillators Verified by Measurements

Stegner

Gropp

Podoskin

et al. 2018

Sensors

View full text Add to dashboard Cite

show abstract

“…Micro-electro-mechanical systems (MEMS) can be manufactured using a wide range of technologies such as by micro machining of silicon-based materials or by photolithography of a UV sensitive resin. However, ceramic materials are also useful alternative, especially in applications such as biomedical micro devices and implants, gas sensors, cutting tools, and components for harsh environments and at high temperatures application [ 1 , 2 , 3 ]. State-of-the-art ceramic micro devices and platforms include few attempts to fabricate ceramic nanocomposite MEMS using the latest advances in nanomaterials, which have made it possible to control the ceramic materials at nano-scale [ 4 , 5 , 6 ].…”

Section: Introductionmentioning

confidence: 99%

Microfabrication of Net Shape Zirconia/Alumina Nanocomposite Micro Parts

et al. 2018

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Recently, there are growing demands in manufacturing of net shape micro parts for wide range of applications due to the increasing interest in miniaturization. In this paper, the fabrication of tetragonal phase zirconia/alumina (YSZ/Al2O3) nanocomposite micro-parts with high quality is presented. The fabrication process is based on soft lithography and colloidal powder dispersion. Experimental results showed that by optimizing the soft lithography and the dispersion process, it was possible to produce high-resolution micro-parts with well dispersed alumina. The X-ray diffraction results had confirmed the important role of the alumina particles in eliminating the emergence of monoclinic phase while the microstructures reveal a pure tetragonal phase. In addition, the sintered YSZ/Al2O3 micro parts achieved micro hardness with 20% superior to the pure YSZ sintered micro-parts with the addition of 5% alumina.

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Cross-Hierarchical Design of Compact RF-MEMS Oscillator Circuits on a Silicon-Ceramic Composite Substrate

Stegner

Gropp

Fischer

et al. 2019

2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum (EFTF/IFC)

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Design and implementation of a MEMS-based RF oscillator on a unique silicon-ceramic composite substrate

Cited by 5 publications

References 7 publications

An Analytical Temperature-Dependent Design Model for Contour-Mode MEMS Resonators and Oscillators Verified by Measurements

An Analytical Temperature-Dependent Design Model for Contour-Mode MEMS Resonators and Oscillators Verified by Measurements

Microfabrication of Net Shape Zirconia/Alumina Nanocomposite Micro Parts

Cross-Hierarchical Design of Compact RF-MEMS Oscillator Circuits on a Silicon-Ceramic Composite Substrate

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