Design and Implementation of a Dual-Mass MEMS Gyroscope with High Shock Resistance

Abstract

This paper presents the design and implementation of a dual-mass MEMS gyroscope with high shock resistance by improving the in-phase frequency of the gyroscope and by using a two-stage elastic stopper mechanism and proposes a Simulink shock model of the gyroscope equipped with the two-stage stopper mechanism, which is a very efficient method to evaluate the shock resistance of the gyroscope. The structural design takes into account both the mechanical sensitivity and the shock resistance. The design of the primary structure and the analysis of the stopper mechanism are first introduced. Based on the expression of the restoring force of the stopper beam, the analytical shock response model of the gyroscope is obtained. By this model, the shock response of the gyroscope is theoretically analyzed, and the appropriate structural parameters are obtained. Then, the correctness of the model is verified by finite element (FE) analysis, where the contact collision analysis is introduced in detail. The simulation results show that the application of the two-stage elastic stopper mechanism can effectively improve the shock resistance by more than 1900 g and 1500 g in the x- and y-directions, respectively. Finally, experimental verifications are carried out by using a machete hammer on the micro-gyroscope prototype fabricated by the deep dry silicon on glass (DDSOG) technology. The results show that the shock resistance of the prototype along the x-, y- and z-axes all exceed 10,000 g. Moreover, the output of the gyroscope can return to normal in about 2 s.

Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage Mechanism

“…In this simulation, the parameters of the structure, material properties of silicon, mesh division and element type are the same as those of the modal analysis. According to previous experimental results, the quality factor of MEMS gyroscopes is about 3000–8000 [33]. In this analysis, when the quality factor of type B is 4000, the quality factor of types A1, A2 and A3 can be calculated by the previous assumptions and defined as 6328, 6565 and 6605, respectively.…”

“…Therefore, the lever, frame and proof mass are simplified to inelastic mass and beam to massless spring. It is worth mention here that the lumped-parameter model used in this study is based on linear elastic material behavior, which is very widely used in the research of TFG [6,14,21,33,34,35]. Furthermore, the nonlinear analysis of the overall structure will be discussed in detail later.…”

Reliability of MEMS inertial devices in mechanical and thermal environments: A review

“…Consequently, to achieve a balance between impact resistance and mechanical sensitivity, Yang Gao increased the resonant frequency of the MEMS gyroscope and adopted a two-stage elastic baffle structure. The shock tests indicated that the proposed structure could withstand impacts of up to 10,000 g [ 54 ]. However, the baffle structures could potentially lead to particle contamination and short circuits due to silicon residues generated during impact.…”

Design and Simulation of a Novel Single-Chip Integrated MEMS Accelerometer Gyroscope

“…Based on the deep dry silicon on glass (DDSOG) processing technology, a single-chip integrated accelerometer gyroscope is proposed. The procedures of the DDSOG technology are shown in Figure 4 [24]. The DDSOG process is simple and the yield is high.…”