Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage Mechanism

Li, Zezhang; Gao, Shiqiao; Jin, Lei; Liu, Haipeng; Guan, Yanwei; Peng, Shigang

doi:10.3390/s19163455

Cited by 15 publications

(5 citation statements)

References 37 publications

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“…Among them, the tuning fork gyroscope is mostly preferred due to its superior performance with regard to its flat structure for mass production, common-mode rejection, and low power consumption [11][12][13]. The sensitivity of the tuning fork gyroscope is one of the main challenges in terms of superior performance [14].…”

Section: Introductionmentioning

confidence: 99%

“…For example, Behbahan et al proposed a systematic post fabrication technique to reduce the modal frequency differences between the n = 2 and n = 3 modes in an axisymmetric resonator [19]. Li et al presented a leverage mechanism to improve the mechanical sensitivity of a MEMS gyroscope [14]. Xu et al investigated a tuning fork gyroscope with a polygon-shaped vibration beam, and improved the sensitivity by optimizing the spindle azimuth [25].…”

Section: Introductionmentioning

confidence: 99%

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Design and Optimization of a Novel MEMS Tuning Fork Gyroscope Microstructure

Xiong

Zeng

et al. 2022

Micromachines

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This paper presents the design and optimization of a novel MEMS tuning fork gyroscope microstructure. In order to improve the mechanical sensitivity of the gyroscope, much research has been carried out in areas such as mode matching, improving the quality factor, etc. This paper focuses on the analysis of mode shape, and effectively optimizes the decoupling structure and size of the gyroscope. In terms of structural design, the vibration performance of the proposed structure was compared with other typical structures. It was found that slotting in the middle of the base improved the transmission efficiency of Coriolis vibration, and opening arc slots between the tines reduced the working modal order and frequency. In terms of size optimization, the Taguchi method was used to optimize the relevant feature sizes of the gyroscope. Compared with the initial structure, the transmission efficiency of Coriolis vibration of the optimized gyroscope was improved by about 18%, and the working modal frequency was reduced by about 2.7 kHz. Improvement of these two indicators will further improve the mechanical sensitivity of the gyroscope.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Design and Optimization of a Novel MEMS Tuning Fork Gyroscope Microstructure

Xiong

Zeng

et al. 2022

Micromachines

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“…Some of the MEMS industry’s challenges are design miniaturization and structure simplicity, including both the MEMS mechanical part and circuit integration. Besides this, the gyroscope’s sound performance is vital, particularly in terms of sensitivity and cross-axis sensitivity, to meet today’s challenging industry specifications [ 12 , 13 ]. Manufacturing uncertainties always exist due to the limitations of the design principle and the machining accuracy and are relatively more numerous in MEMS devices than macro-scale devices.…”

Section: Introductionmentioning

confidence: 99%

Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope

2021

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In this paper, a new design technique is presented to estimate and reduce the cross-axis sensitivity (CAS) in a single-drive multi-axis microelectromechanical systems (MEMS) gyroscope. A simplified single-drive multi-axis MEMS gyroscope, based on a mode-split approach, was analyzed for cross-axis sensitivity using COMSOL Multiphysics. A design technique named the “ratio-matching method” of drive displacement amplitudes and sense frequency differences ratios was proposed to reduce the cross-axis sensitivity. Initially, the cross-axis sensitivities in the designed gyroscope for x and y-axis were calculated to be 0.482% and 0.120%, respectively, having an average CAS of 0.301%. Using the proposed ratio-matching method and design technique, the individual cross-axis sensitivities in the designed gyroscope for x and y-axis were reduced to 0.018% and 0.073%, respectively. While the average CAS was reduced to 0.045%, showing a reduction rate of 85.1%. Moreover, the proposed ratio-matching method for cross-axis sensitivity reduction was successfully validated through simulations by varying the coupling spring position and sense frequency difference variation analyses. Furthermore, the proposed methodology was verified experimentally using fabricated single-drive multi-axis gyroscope.

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“…The hinge mechanisms with the advantage of rotation characteristic have attracted much attention and applied in MEMS devices, such as MEMS TFG, MEMS accelerometer and ring coupled gyroscope (RCG) [33][34][35]. The in-plane, n = 3 mode RCG designs of hinge mechanism have been adopted to increase the capacitive transduction areas by means of the auxiliary arrayed transducers.…”

Section: Introductionmentioning

confidence: 99%

Micromachined Vibrating Ring Gyroscope Architecture with High-Linearity, Low Quadrature Error and Improved Mode Ordering

Gao

Jin

et al. 2020

Sensors

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A new micromachined vibrating ring gyroscope (VRG) architecture with low quadrature error and high-linearity is proposed, which successfully optimizes the working modes to first order resonance mode of the structure. The improved mode ordering can significantly reduce the vibration sensitivity of the device by adopting the hinge-frame mechanism. The frequency difference ratio is introduced to represent the optimization effect of modal characteristic. Furthermore, the influence of the structural parameters of hinge-frame mechanism on frequency difference ratio is clarified through analysis of related factors, which contributes to a more effective design of hinge-frame structure. The designed VRG architecture accomplishes the goal of high-linearity by using combination hinge and variable-area capacitance strategy, in contrast to the conventional approach via variable-separation drive/sense strategy. Finally, finite element method (FEM) simulations are carried out to investigate the stiffness, modal analysis, linearity, and decoupling characteristics of the design. The simulation results are sufficiently in agreement with theoretical calculations. Meanwhile, the hinge-frame mechanism can be widely applied in other existing ring gyroscopes, and the new design provides a path towards ultra-high performance for VRG.

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Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage Mechanism

Cited by 15 publications

References 37 publications

Design and Optimization of a Novel MEMS Tuning Fork Gyroscope Microstructure

Design and Optimization of a Novel MEMS Tuning Fork Gyroscope Microstructure

Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope

Micromachined Vibrating Ring Gyroscope Architecture with High-Linearity, Low Quadrature Error and Improved Mode Ordering

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