2017
DOI: 10.1002/ctpp.201700112
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Design and optical study of a microwave plasma torch in nitrogen used for the evaporation of aluminium wires

Abstract: A microwave torch in nitrogen has been designed for the evaporation of aluminium (Al) wires potentially to be used for the synthesis of aluminium nitride (AlN). The torch, created on the tip of a metallic nozzle, is compatible with vacuum conditions and can be operated in continuous mode up to atmospheric pressure. Al wires to be evaporated are fed through the axis of the nozzle. Time‐resolved photography is applied to analyse the time evolution and stability of the interaction of the Al wire with the discharg… Show more

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Cited by 2 publications
(1 citation statement)
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“…Gas discharges at reduced pressures are actively investigated for optimization of known plasma technologies such as the deposition of diamond [1] or boron nitride [2] hard films, the fabrication of semiconductors [3,4], as well as for expanding to new fields, e.g. the growth of GaN and AlN crystals [5,6]. Thermochemical diffusion treatments, namely nitriding, carburizing, or nitrocarburizing processes, are well known for hardening of steel surfaces [7].…”
Section: Introductionmentioning
confidence: 99%
“…Gas discharges at reduced pressures are actively investigated for optimization of known plasma technologies such as the deposition of diamond [1] or boron nitride [2] hard films, the fabrication of semiconductors [3,4], as well as for expanding to new fields, e.g. the growth of GaN and AlN crystals [5,6]. Thermochemical diffusion treatments, namely nitriding, carburizing, or nitrocarburizing processes, are well known for hardening of steel surfaces [7].…”
Section: Introductionmentioning
confidence: 99%