Design and optimization of a doubly clamped piezoresistive acceleration sensor with an integrated silicon nanowire piezoresistor

Sivaprakash, V.; Mathew, Ribu; Sankar, A. Ravi

doi:10.1007/s00542-016-3219-2

Cited by 24 publications

(13 citation statements)

References 43 publications

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“…There are many research literature about piezoresistive acceleration sensor. Vetrivel et al [13] introduce the design and optimization of a doubly clamped acceleration sensor with integrated silicon nanowire piezoresistors. Messina et al [14] elucidate an increment of the MMI is a viable optimization method for a single mass mechanical structure of a piezoresistive accelerometer sensor.…”

Section: Related Workmentioning

confidence: 99%

The Sensitivity Design of Piezoresistive Acceleration Sensor in Industrial IoT

Dong¹,

Ye²,

Liu³

et al. 2019

IEEE Access

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Piezoresistive acceleration sensors are widely used in various fields of the industrial Internet of Things because of their lightweight, fast response, and small size. The structural sensitivity of the sensor affects the accuracy of the measurement. And the sensitivity that the traditional method designs are only a feasible solution, not an optimal solution. Due to the differences in factory processes, the optimization of structural sensitivity is an NP-hard problem. To solve the design problem of structural sensitivity, we adopt the swarm intelligence algorithm in this paper, and we design a model for the structural sensitivity of the piezoresistive acceleration sensor. In addition, an improved grasshopper optimization algorithm (CC-GOA) that combines chaos strategy and Cauchy mutation is proposed to optimize the structural sensitivity of the piezoresistive acceleration sensor, and the structure of the sensor is composed of four beams and mass block. The experiments are compared with six well-known algorithms on 16 benchmark functions to verify the algorithm performance of CC-GOA, and then, the structural sensitivity of the piezoresistive acceleration sensor is optimized by CC-GOA. The results indicate that the piezoresistive acceleration sensor is designed with high sensitivity and superiority.

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Section: Related Workmentioning

confidence: 99%

The Sensitivity Design of Piezoresistive Acceleration Sensor in Industrial IoT

Dong¹,

Ye²,

Liu³

et al. 2019

IEEE Access

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“…and current components from the resistors at the output are fed back to the input. The voltage Vo at the output can be described as (2) The gain of the CFIA can be controlled by changing the ratio between R1 and R2. To obtain high gain accuracy, Gm1 and Gm2 should be matched, and the high open loop gain of Gm1•Gm3 are required.…”

Section: Introductionmentioning

confidence: 99%

Low-Noise Resistive Bridge Sensor Analog Front-End Using Chopper-Stabilized Multipath Current Feedback Instrumentation Amplifier and Automatic Offset Cancellation Loop

et al. 2022

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Resistive bridge sensors are used in many application areas to measure changes in physical parameters. To amplify the resistive changes from sensing elements with high precision, various offset contributors in the resistive bridge and amplifiers should be minimized. This study proposes a low-noise resistive bridge sensor analog front-end (AFE) using a chopper-stabilized multipath current feedback instrumentation amplifier (CFIA) and an automatic offset cancellation loop. The proposed circuit exploits a multipath chopper-stabilized architecture for obtaining low noise performance and wide bandwidth characteristics. This circuit can minimize the offsets in the bridge and the high frequency and low frequency amplifiers, while achieving high precision resistive signal acquisition. The high frequency path of the multipath amplifier uses the CFIA topology with class-AB output stage. The offset in the high frequency path is stabilized by the low frequency path amplifier with a high gain and low noise chopper amplifier. The up-modulated offset in the low frequency chopper amplifier path is reduced by the AC-coupled ripple reduction loop (RRL). An automatic offset calibration loop (AOCL) circuit was designed to calibrate the offset due to the bridge mismatch. The AOCL reduces the bridge offset using a successive approximation register (SAR)-based binary-search algorithm. The gain of the proposed circuit is adjustable from 15.56 dB to 44.14 dB. The AFE is implemented in a 0.18 μm CMOS process and draws 123 μA current from a 3.3 V supply. The input referred noise and noise efficiency factor (NEF) are 14.6 nV/√Hz and 6.1, respectively.INDEX Resistive analog front-end, current feedback instrumentation amplifier (CFIA), multipath amplifier, automatic offset calibration loop (AOCL)

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“…An e-nose is a sensing element that converts the ethylene gas concentration into an equivalent electrical signal that gives an indication of fruit maturity under study. Typical sensors have been realized using micro-electro-mechanical system (MEMS) technology to detect various physical [5][6][7][8][9][10][11][12], chemical/biological [13][14][15][16][17][18][19][20][21][22][23] entities. Such sensors depict high sensitivity and performance to cost index due to their high surface-to-volume ratio and possibility of batch fabrication.…”

Section: Introductionmentioning

confidence: 99%

Recent Advances in ZnO Based Electrochemical Ethylene Gas Sensors for Evaluation of Fruit Maturity

Mathew

Das

2021

Springer Proceedings in Materials

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India is the largest producer of fruits and vegetables in the world. However, a major portion of agro-products is wasted during harvesting, shipping, and storage, i.e., negligence in the food supply chain management (FSCM) system. Globally, one third of food produced is wasted. Importantly, two-third of the wastage of food occurs due to limitations in the supply chain management system. Wastage of perishable agro-products due to negligence in FSCM is a critical issue, especially in the case of agro-products like fruit. Therefore, the early detection and segregation of fruits are critical to reduce agro-product wastage. A typical indicator of maturity and ripening of fruits is the rate of generation and concentration of ethylene gas. Even though, literature encompasses examples of a variety of ethylene gas sensors, ZnO based electrochemical ethylene gas sensors depict numerous advantages compared to other sensor variants. ZnO is an extensively studied wide band gap semiconductor for sensing applications. When used as a sensing layer material it 'senses', ethylene gas by changing its band gap and thereby electrical property. Further, the sensitivity and selectivity of the pristine ZnO vary with shape, substrate, and metal doping. This paper elucidates a review of recent advances in ZnO based electrochemical sensors for ethylene gas detection. The review covers various levels of design abstraction that include material and device. In addition, we summarize the design challenges and future trends in the development of ZnO based electrochemical ethylene gas sensors.

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Design and optimization of a doubly clamped piezoresistive acceleration sensor with an integrated silicon nanowire piezoresistor

Cited by 24 publications

References 43 publications

The Sensitivity Design of Piezoresistive Acceleration Sensor in Industrial IoT

The Sensitivity Design of Piezoresistive Acceleration Sensor in Industrial IoT

Low-Noise Resistive Bridge Sensor Analog Front-End Using Chopper-Stabilized Multipath Current Feedback Instrumentation Amplifier and Automatic Offset Cancellation Loop

Recent Advances in ZnO Based Electrochemical Ethylene Gas Sensors for Evaluation of Fruit Maturity

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