Silicon optical receivers, operating at the optical communication wavelengths in the 1.3-1.55 µm range, have attracted much research effort. Unfortunately, the performance of the devices proposed in literature are poor because this wavelength range is beyond the absorption edge of silicon. In order to extend the maximum detectable wavelength, the most common approach, in the realization of Si-based detectors, is the use of silicon-germanium layers on silicon, anyway, requiring processes non compatible with standard CMOS technology. In this paper, with the aim to extend the operation of silicon-based photo-detectors up to the 1.3-1.55 µm range, an alternative approach is investigated: we propose the design of a resonant cavity enhanced Schottky photodetector based on the internal photoemission effect. The device fabrication is completely compatible with standard silicon technology.
1.IntroductionHigh performance photodetectors operating at the wavelength of 1.55 micron are required for ultrafast photodetection in optical communication, measurement and sampling systems. The photodetector performance is measured by the bandwidth-efficiency product. For conventional vertically illuminated photodetectors, quantum efficiency and bandwidth have inverse dependencies on the photoabsorption layer thickness. This limit is overcome by edge-coupled and waveguides configurations. The disadvantages of these classes of devices are a more complex fabrication and integration, along with more difficult light coupling [1].Resonant-cavity-enhanced (RCE) photodetectors offer the best performance in order to overcome the limitation of conventional photodetectors. The enhancement in in RCE photodetectors, defined as the probability that a single photon incident on the device generates an electron hole pair which contributes to the detector current, is obtained by placing the active strucuture inside a Fabry-Perot resonat microcavity. The enhancement of the optical field in a FabryPerot resonator allows the use of thin absorbing layers, which minimizes the transit time of the photogenerated carriers without hampering the quantum efficiency. RCE devices benefit from the wavelength selectivity and the large increase of the resonant optical field introduced by the cavity [2].RCE photodetector research has mainly concentrated on using p-i-n type photodiodes (PD's) [3,4], whereas there have been only a few reports on RCE Schottky PD's [5,6,7]. In top-illuminated RCE Schottky PD's, a Schottky contact can also function as the top reflector of the resonant cavity. Optical losses in the metal contact limit the quantum efficiency. Effort to increase the device responsivity has been pursued by utilizing semi-transparent Sckottky contacts. The RCE detection scheme is particularly attractive for Schottky type photodetector, since it allows the fabrication of high performance photoreceivers by means of the relatively simple structures and fabrication processes.Traditionally, the operation of conventional and RCE photodetectors are based on the semicon...