Design and Performance Comparison of Single- and Double-Hot Arm Polysilicon Surface Micromachined Electrothermal Actuators and Arrays Applied to Realize a Microengine

Kolesar, Edward S.; Htun, Thiri; Least, Brandon; Tippey, Jeffrey

doi:10.1109/nano.2008.136

Cited by 3 publications

(1 citation statement)

References 6 publications

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“…With the in-depth study, the physical principles of all available actuators have been explored. According to their operational mechanisms, there are different classes of microactuators such as piezoelectric [1,2], electrostatic [3,4], electro-thermal [5][6][7], and electromagnetic [8]. Among these, the electro-thermal actuator, based on the Joule heat effect, is capable of generating large displacement and driven force, when an appropriate voltage is applied to it.…”

Section: Introductionmentioning

confidence: 99%

Analysis of the dynamic behavior of a V-shaped electrothermal microactuator

Chen

Wang

et al. 2020

J. Micromech. Microeng.

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This paper presents an accurate and complete analysis of the dynamic performance of a V-shaped microactuator. This multi-physical coupling analysis is split into two steps: the electro-thermal sub-model for temperature distribution and the thermo-elastic sub-model for displacement. For the electro-thermal sub-model, a combination of the Chebyshev spectral method and the improved Euler method is utilized to predict the thermal dynamic behavior, where a piecewise partial differential equation exists. This method is found to have conditional stability which is dependent on time steps and number of points. Although a one-dimensional geometric model is used in it, the obtained temperature profile hardly shows a difference over time compared with that from the finite element method where a three-dimensional geometric model is established. The method’s calculation time is also sharply reduced. According to the forced vibration theory, the thermo-elastic sub-model is rebuilt regardless of the damping term. When applied to different voltages, the displacement of the actuator at a steady state is validated by an experiment and an ANSYS simulation. Furthermore, the result of the transient displacement also shows a good agreement with the ANSYS simulation.

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Section: Introductionmentioning

confidence: 99%

Analysis of the dynamic behavior of a V-shaped electrothermal microactuator

Chen

Wang

et al. 2020

J. Micromech. Microeng.

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Theoretical analysis for dynamic model of U-shaped electrothermal microactuator based on Chebyshev spectral method

Tang,

Chen,

Wang

2024

J. Phys.: Conf. Ser.

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This paper presents a largely and accurate analysis for dynamic model of U-shaped actuator that considers the material parameters dependent on temperature. The electro-thermal analysis for temperature distribution and thermo-mechanical analysis for deflection is carried out. The electro-thermal dynamic behaviour is described by piecewise one-dimensional (1D) heat transfer partial differential equations (PDE) for each beam of U-shaped actuator. A combination of Chebyshev spectral method for space domain and Euler forward difference method for time domain is used to solve these equations. The convergence test is first done to ensure the result convinced.

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