Development and Testing of a Multilevel Chevron Actuator-Based Positioning System

Oak, Sahil; Rawool, Sandesh; Sivakumar, G.; Hendriske, E. J.; Buscarello, Daniel; Dallas, Tim

doi:10.1109/jmems.2011.2167674

Cited by 11 publications

(7 citation statements)

References 24 publications

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“…Electrothermal microactuators have been developed for a variety of applications in MEMS (microelectromechanical systems) including RF switches [1], micropumps [2], microgrippers [3,4], nanopositioners [5,6], and microtesting devices [7]. Compared to other types of actuation mechanisms such as electrostatic [8], electromagnetic [9], and piezoelectric [10], electrothermal microactuators work on the thermal expansions of beam structures and have been demonstrated to be compact, stable, and large displacement and force techniques [11,12].…”

Section: Introductionmentioning

confidence: 99%

Vibration Modes and Parameter Analysis of V‐Shaped Electrothermal Microactuators

Zhang

2018

Shock and Vibration

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Comprehensive analysis on the modal characteristics of V-shaped electrothermal microactuators is presented in this paper for the first time. Considering the unique geometric characteristics of the V-shaped beam, that is, two inclined beams supporting a movable shuttle, both the lateral and longitudinal deflections are taken into account in the modal analysis. Boundary and continuity conditions are employed to obtain the frequency equation. Natural frequencies are then obtained by solving the frequency equation. Mode shapes corresponding to their natural frequencies are also calculated analytically. e theoretical modal analysis is verified with the finite element analysis using ANSYS software. Based on the model analysis, this paper further investigates the relationship between natural frequencies and the volume scaling of the V-shaped beam. Finally, comprehensive parametric studies in terms of material properties and structural dimensions are conducted to provide insights and guidance in designing the V-shaped beam electrothermal microactuators.

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Section: Introductionmentioning

confidence: 99%

Vibration Modes and Parameter Analysis of V‐Shaped Electrothermal Microactuators

Zhang

2018

Shock and Vibration

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“…For example, engineers have demonstrated linkages for microsystems 6–9 , but have not investigated the related limits of performance and reliability at the smallest relevant scales. There are at least three challenges to such investigations.…”

Section: Introductionmentioning

confidence: 99%

“…This is particularly important in cases when coupling interactions result in motion that is aperiodic or nondeterministic. In any case, single motion cycles are essential for a variety of applications in which the motion of the microsystem is fundamentally aperiodic, such as positioning and switching 6,10,28 .…”

Section: Introductionmentioning

confidence: 99%

“…These measurement methods enable the first quantitative study of the transfer of motion through a microelectromechanical linkage at nanometer and microradian scales. Figure 1 shows the microsystem, which integrates a translating link coupling through a pin-in-slot joint to a rotating link on an eccentric pivot 6 . This test system is representative of a class of microsystems that transfer motion through assemblies of parts to perform work requiring complex kinematics.…”

Section: Introductionmentioning

confidence: 99%

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Transfer of motion through a microelectromechanical linkage at nanometer and microradian scales

et al. 2016

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Mechanical linkages are fundamentally important for the transfer of motion through assemblies of parts to perform work. Whereas their behavior in macroscale systems is well understood, there are open questions regarding the performance and reliability of linkages with moving parts in contact within microscale systems. Measurement challenges impede experimental studies to answer such questions. In this study, we develop a novel combination of optical microscopy methods that enable the first quantitative measurements at nanometer and microradian scales of the transfer of motion through a microelectromechanical linkage. We track surface features and fluorescent nanoparticles as optical indicators of the motion of the underlying parts of the microsystem. Empirical models allow precise characterization of the electrothermal actuation of the linkage. The transfer of motion between translating and rotating links can be nearly ideal, depending on the operating conditions. The coupling and decoupling of the links agree with an ideal kinematic model to within approximately 5%, and the rotational output is perfectly repeatable to within approximately 20 microradians. However, stiction can result in nonideal kinematics, and input noise on the scale of a few millivolts produces an asymmetric interaction of electrical noise and mechanical play that results in the nondeterministic transfer of motion. Our study establishes a new approach towards testing the performance and reliability of the transfer of motion through assemblies of microscale parts, opening the door to future studies of complex microsystems.

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“…However, there are only a few publications demonstrating multi-state latched systems. Such latched microactuator systems have been implemented in chevronlatch [24] and chevron-peg [25] mechanisms. A shutter-based latched VOA driven by electrothermal shape bimorph actuators was described by Syms et al [5] and used an optical lever format in conjunction with a conventional rack-andtooth mechanism yielding a discrete set of attenuation states over a 30 dB range through 1 μm incremental steps of the shutter.…”

Section: Introductionmentioning

confidence: 99%

Modeling and Characterization of a Vernier Latching MEMS Variable Optical Attenuator

Unamuno

Blue

Uttamchandani

2013

J. Microelectromech. Syst.

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We report on the modeling and testing of a Vernier latched MEMS variable optical attenuator (VOA) which uses chevron electrothermal microactuators to control fiber-to-fiber optical power coupling. The use of microlatches has the advantage of holding the mechanical position of the fiber, and therefore the level of attenuation, with no electrical energy supplied except only to change the attenuation. Results of analytical electro-thermomechanical models of the device are obtained and compared with experimental test results, showing a good agreement. A step resolution of 0.5 μm for this multi-state latched device is achieved using a Vernier latch approach. This incremental step size is smaller than previously reported latched microactuators. The VOA demonstrated an attenuation range of over 47 dB and an insertion loss of 1 dB. The wavelength dependent loss across the optical communications C-band is 1.4 dB at 40 dB attenuation and the 10-90% transition time of the unlatched VOA is measured to be 1.7 ms.[2012-0382]

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Development and Testing of a Multilevel Chevron Actuator-Based Positioning System

Cited by 11 publications

References 24 publications

Vibration Modes and Parameter Analysis of V‐Shaped Electrothermal Microactuators

Vibration Modes and Parameter Analysis of V‐Shaped Electrothermal Microactuators

Transfer of motion through a microelectromechanical linkage at nanometer and microradian scales

Modeling and Characterization of a Vernier Latching MEMS Variable Optical Attenuator

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