Design and simulation of a passive-type constant-force MEMS microgripper

Yang, Sijie; Xu, Qingsong

doi:10.1109/robio.2017.8324564

Cited by 6 publications

(5 citation statements)

References 18 publications

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“…Boudaoud et al [35] used a comb-drive actuator guided by bending beams clamped on both sides, connected to a complex capacitive force sensor. Such constant force mechanisms (CFM) achieve a constant output force at specific deflection levels by applying an external force, such as a voltage [36,37]. In the constant force region, the stiffness of such springs is ideally 0 N/m.…”

Section: Guiding Mechanisms For Long-stroke Actuatorsmentioning

confidence: 99%

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Non-Inchworm Electrostatic Cooperative Micro-Stepper-Actuator Systems with Long Stroke

et al. 2023

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In this paper, we present different microelectromechanical systems based on electrostatic actuators, and demonstrate their capacity to achieve large and stepwise displacements using a cooperative function of the actuators themselves. To explore this, we introduced micro-stepper actuators to our experimental systems, both with and without a guiding spring mechanism; mechanisms with such guiding springs can be applied to comb-drive and parallel-plate actuators. Our focus was on comparing various guiding spring designs, so as to increase the actuator displacement. In addition, we present systems based on cascaded actuators; these are converted to micromechanical digital-to-analog converters (DAC). With DACs, the number of actuators (and thus the complexity of the digital control) are significantly reduced in comparison to analog stepper-actuators. We also discuss systems that can achieve even larger displacements by using droplet-based bearings placed on an array of aluminum electrodes, rather than guiding springs. By commutating the voltages within these electrode arrays, the droplets follow the activated electrodes, carrying platforms atop themselves as they do so. This process thus introduces new applications for springless large displacement stepper-actuators.

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Section: Guiding Mechanisms For Long-stroke Actuatorsmentioning

confidence: 99%

“…Actuators 2023, 12, x FOR PEER REVIEW 6 of 22 mechanisms (CFM) achieve a constant output force at specific deflection levels by applying an external force, such as a voltage [36,37]. In the constant force region, the stiffness of such springs is ideally 0 N/m.…”

Section: Guiding Mechanisms For Long-stroke Actuatorsmentioning

confidence: 99%

Non-Inchworm Electrostatic Cooperative Micro-Stepper-Actuator Systems with Long Stroke

et al. 2023

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“…There are also springs with a constant FDC [ 7 ]. The springs realize a constant force feedback when applying an external force, e.g., a voltage [ 8 , 9 ]. Consequently, the resulting force is not proportional to the deflection [ 9 ].…”

Section: Introductionmentioning

confidence: 99%

“…The springs realize a constant force feedback when applying an external force, e.g., a voltage [ 8 , 9 ]. Consequently, the resulting force is not proportional to the deflection [ 9 ]. In the constant force range, the stiffness, k x , of such springs is ideally 0 N/m.…”

Section: Introductionmentioning

confidence: 99%

Highly Selective Tilted Triangular Springs with Constant Force Reaction

Schmitt,

Hoffmann

2024

Sensors

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Guiding mechanisms are among the most elementary components of MEMS. Usually, a spring is required to be compliant in only one direction and stiff in all other directions. We introduce triangular springs with a preset tilting angle. The tilting angle lowers the reaction force and implements a constant reaction force. We show the influence of the tilting angle on the reaction force, on the spring stiffness and spring selectivity. Furthermore, we investigate the influence of the different spring geometry parameters on the spring reaction force. We experimentally show tilted triangular springs exhibiting constant force reactions in a large deflection range and a comb-drive actuator guided by tilted triangular springs. This is an expanded research article based on the conference paper “Tilted Triangular Springs with Constant Force Reaction” that was presented at EUROSENSORS2023 conference, 10–13 September 2023 in Lecce, Italy.

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“…Yang et al [6] establish a passive-type constant-force microgripper. In their system, the constant force is realized using a combination of inclined bi-stable beams and straight leaf flexures.…”

Section: Introductionmentioning

confidence: 99%

Design and Characterization of an Electrostatic Constant-Force Actuator Based on a Non-Linear Spring System

et al. 2021

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In recent years, tissue engineering with mechanical stimulation has received considerable attention. In order to manipulate tissue samples, there is a need for electromechanical devices, such as constant-force actuators, with integrated deflection measurement. In this paper, we present an electrostatic constant-force actuator allowing the generation of a constant force and a simultaneous displacement measurement intended for tissue characterization. The system combines a comb drive structure and a constant-force spring system. A theoretical overview of both subsystems, as well as actual measurements of a demonstrator system, are provided. Based on the silicon-on-insulator technology, the fabrication process of a moveable system with an extending measurement tip is shown. Additionally, we compare measurement results with simulations. Our demonstrator reaches a constant-force of 79 ± 2 μN at an operating voltage of 25 V over a displacement range of approximately 40 μm, and the possibility of adjusting the constant-force by changing the voltage is demonstrated.

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Design and simulation of a passive-type constant-force MEMS microgripper

Cited by 6 publications

References 18 publications

Non-Inchworm Electrostatic Cooperative Micro-Stepper-Actuator Systems with Long Stroke

Non-Inchworm Electrostatic Cooperative Micro-Stepper-Actuator Systems with Long Stroke

Highly Selective Tilted Triangular Springs with Constant Force Reaction

Design and Characterization of an Electrostatic Constant-Force Actuator Based on a Non-Linear Spring System

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