Design and simulation of a high tuning range MEMS digital varactor using SU-8

Ramli, Noor Amalina; Arslan, Tughrul; Haridas, Nakul; Zhou, Wei

doi:10.1109/dtip.2016.7514842

Cited by 5 publications

(2 citation statements)

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“…Fabrication issues in MEMS (Micro-Electro-Mechanical System) switches can significantly impact their performance, reliability, and commercial viability [163][164][165]. The following are some key fabrication issues commonly encountered in MEMS switches:…”

Section: Fabrication Issues In Mems Switchesmentioning

confidence: 99%

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Kurmendra,

Agarwal

2024

Micromachines

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Micro-Electro-Mechanical System (MEMS) switches have emerged as pivotal components in the realm of miniature electronic devices, promising unprecedented advancements in size, power consumption, and versatility. This literature review paper meticulously examines the key issues and challenges encountered in the development and application of MEMS switches. The comprehensive survey encompasses critical aspects such as material selection, fabrication intricacies, performance metrics including switching time and reliability, and the impact of these switches on diverse technological domains. The review critically analyzes the influence of design parameters, actuation mechanisms, and material properties on the performance of MEMS switches. Additionally, it explores recent advancements, breakthroughs, and innovative solutions proposed by researchers to address these challenges. The synthesis of the existing literature not only elucidates the current state of MEMS switch technology but also paves the way for future research avenues. The findings presented herein serve as a valuable resource for researchers, engineers, and technologists engaged in advancing MEMS switch technology, offering insights into the current landscape and guiding future endeavors in this rapidly evolving field.

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Section: Fabrication Issues In Mems Switchesmentioning

confidence: 99%

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Kurmendra,

Agarwal

2024

Micromachines

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“…State-of-the-art technologies realize tunable capacitors either by MEMS based mechanical changes in geometry [6], by inversion type metaloxide-semiconductor (MOS) stacks [2] or a change in the dielectric constant of the insulating material in metal-insulatormetal stacks, e.g. implemented by ferroelectric [7] or liquid crystal [8] type dielectrics.…”

Section: Introductionmentioning

confidence: 99%

Geometry-Based Tunability Enhancement of Flexible Thin-Film Varactors

Knobelspies

Gonnelli

Vogt

et al. 2017

IEEE Electron Device Lett.

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Design, simulation and analysis of a digital RF MEMS varactor using thick SU-8 polymer

et al. 2017

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initial displacement of the proposed horizontal truss fixedfixed beam structure. Compared to the conventional doubly clamped solid beam design, the proposed beam has less sensitivity to in-plane residual stress. This makes the pull in voltage to be less affected by the stress due to the fabrication. The simulated pull-in and lift-off voltages are 30 and 25 V respectively while the estimated switching time for the beam is 4.64 μs. The overall size of the varactor is 740 μm × 653 μm. The proposed RF MEMS varactor could be integrated in reconfigurable filters, phase shifters and matching networks targeting future multi-standard wireless communication systems.

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Design and simulation of a high tuning range MEMS digital varactor using SU-8

Abstract: I hereby declare that this thesis has been composed by myself and that except where stated, the work contained is my own. I also declare that the work contained in this thesis has not been submitted for any other degree or professional qualification except as specified.

Cited by 5 publications

References 60 publications

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Geometry-Based Tunability Enhancement of Flexible Thin-Film Varactors

Design, simulation and analysis of a digital RF MEMS varactor using thick SU-8 polymer

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